IP Library Patent Application 10288946
Patent Application Utility
App. No. 10/288,946 · Confirmation No. 8701

WEB-FORMAT POLISHING PADS AND METHODS FOR MANUFACTURING AND USING WEB-FORMAT POLISHING PADS IN MECHANICAL AND CHEMICAL-MECHANICAL PLANARIZATION OF MICROELECTRONIC SUBSTRATES

Inventor: David W. Carlson
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2003-08-04 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-11-05 TRNA Transmittal of New Application 4 View
2002-11-05 ADS Application Data Sheet 2 View
2002-11-05 A.PE Preliminary Amendment 3 View
2002-11-05 SPEC Specification 12 View
2002-11-05 CLM Claims 10 View
2002-11-05 ABST Abstract 1 View
2002-11-05 DRW Drawings-only black and white line drawings 6 View
2002-11-05 OATH Oath or Declaration filed 11 View
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Quick Facts
App. No.
10/288,946
Filed
2002-11-05
Granted
2003-10-21
Pub. No.
US20030060140A1
Art Unit
3724
PTA
-6 days