IP Library Granted Patent US 6,746,891
Granted Patent Utility
US 6,746,891 · Confirmation No. 2555

TRILAYERED BEAM MEMS DEVICE AND RELATED METHODS

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Quick Facts
Patent No.
US 6,746,891
App. No.
10/290,920
Filed
2002-11-08
Granted
2004-06-08
Pub. No.
US20030119221A1
Art Unit
2812
PTA
0 days