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US 6,835,991 · Confirmation No. 5370

METHOD AND APPARATUS FOR IMPROVING RESOLUTION OF OBJECTS IN A SEMICONDUCTOR WAFER

Inventor: Edwin A. Pell III
Patented Case View Patent ↗ View Publication ↗
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2007-09-18 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
2007-08-30 PA.. Power of Attorney 2 View
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2004-08-18 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-08-18 BIB Bibliographic Data Sheet 1 View
2004-08-18 FWCLM Index of Claims 1 View
2004-08-18 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-18 A.PE Preliminary Amendment 1 View
2004-07-08 FWCLM Index of Claims 1 View
2004-07-08 WFEE Fee Worksheet (SB06) 1 View
2004-06-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-06-24 CLM Claims 2 View
2004-06-24 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-02-20 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-20 FWCLM Index of Claims 1 View
2004-02-20 CTNF Non-Final Rejection 5 View
2004-02-20 892 List of references cited by examiner 1 View
2004-01-29 SRNT Examiner's search strategy and results 2 View
2004-01-22 WFEE Fee Worksheet (SB06) 1 View
2004-01-22 FWCLM Index of Claims 1 View
2003-12-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-12-08 CLM Claims 1 View
2003-12-08 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-06-05 CTNF Non-Final Rejection 5 View
2003-06-05 892 List of references cited by examiner 1 View
2003-06-05 1449 List of References cited by applicant and considered by examiner 3 View
2003-05-29 SRNT Examiner's search strategy and results 7 View
2003-04-15 ELC. Response to Election / Restriction Filed 1 View
2003-03-12 CTRS Requirement for Restriction/Election 4 View
2003-02-11 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-11-07 TRNA Transmittal of New Application 3 View
2002-11-07 A.PE Preliminary Amendment 4 View
2002-11-07 SPEC Specification 5 View
2002-11-07 CLM Claims 3 View
2002-11-07 ABST Abstract 1 View
2002-11-07 DRW Drawings-only black and white line drawings 6 View
2002-11-07 OATH Oath or Declaration filed 2 View
2002-11-07 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-11-07 SRFW Search information including classification, databases and other search related notes 1 View
2002-11-07 FWCLM Index of Claims 1 View
2002-11-07 TRNA Transmittal of New Application 3 View
2002-11-07 DRW Drawings-only black and white line drawings 6 View
2002-11-07 SPEC Specification 5 View
2002-11-07 CLM Claims 3 View
2002-11-07 ABST Abstract 1 View
2002-11-07 OATH Oath or Declaration filed 2 View
2002-11-07 WFEE Fee Worksheet (SB06) 1 View
2002-11-07 WFEE Fee Worksheet (SB06) 1 View
2002-11-07 WCLM Claims Worksheet (PTO-2022) 1 View
2002-11-07 A.PE Preliminary Amendment 1 View
2002-11-07 CLM Claims 1 View
2002-11-07 REM Applicant Arguments/Remarks Made in an Amendment 2 View
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Quick Facts
Patent No.
US 6,835,991
App. No.
10/291,919
Filed
2002-11-07
Granted
2004-12-28
Pub. No.
US20030054604A1
Examiner
DANG, PHUC T
Art Unit
2818
PTA
-129 days