METHOD AND APPARATUS FOR IMPROVING RESOLUTION OF OBJECTS IN A SEMICONDUCTOR WAFER

Inventor: Edwin A. Pell III

Patented Case View Patent ↗ View Publication ↗

	Code	Description	Pages	PDF
2001-04-24	`TRNA`	Transmittal of New Application	3	View
2001-04-24	`SPEC`	Specification	5	View
2001-04-24	`CLM`	Claims	3	View
2001-04-24	`ABST`	Abstract	1	View
2001-04-24	`DRW`	Drawings-only black and white line drawings	8	View
2001-04-24	`OATH`	Oath or Declaration filed	2	View

Inventors

Edwin A. Pell III Rhinebeck, NY

Attorneys & Agents of Record

DANIEL STAUDT Reg. 34733 Attorney · SIEMENS CORPORATION

ROBERT SCOTTI Reg. 39830 Attorney · KLARQUIST SPARKMAN, LLP

FRANK NUZZI Reg. 42944 Attorney · SIEMENS CORPORATION

JEFFREY RICHMOND Reg. 57564 Attorney · MENTOR GRAPHICS CORPORATION

RAJEEV ROHATGI Reg. 62297 Agent · KLARQUIST SPARKMAN LLP

XIN YANG Reg. 62400 Attorney · SIEMENS CORPORATION

MARK WILSON Reg. 63126 Attorney · KLARQUIST SPARKMAN, LLP

JOHN LUNSFORD Reg. 67185 Attorney · F5 NETWORKS

LAWRENCE CHEN Reg. 67768 Attorney · SIEMENS

CARSTEN GRELLMANN Reg. 69774 Attorney · KLARQUIST SPARKMAN LLP

Classification

USPC 438/14

Prosecution

Publication

Patent Term Adjustment

-166days

SIEMENS INDUSTRY SOFTWARE INC.

from MENTOR GRAPHICS CORPORATION, SIEMENS INDUSTRY SOFTWARE INC.

MERGER AND CHANGE OF NAME Recorded 2021-06-16

MENTOR GRAPHICS CORPORATION

from PELL, EDWIN A. III

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2001-04-24

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