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App. No. 10/300,777 · Confirmation No. 7694

METHOD FOR CORRECTING CHARACTERISTICS OF ATTENUATED PHASE-SHIFT MASK

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Quick Facts
App. No.
10/300,777
Filed
2002-11-21
Granted
2004-10-05
Pub. No.
US20030071018A1
Art Unit
1746
PTA
-56 days