Patent Application
Utility
App. No. 10/872,464
· Confirmation No. 4061
Method for correcting characteristics of attenuated phase-shift mask
Inventor:
Katsuhiro Takushima
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2007-11-01 | ABN |
Abandonment | 2 | View | |
| 2007-03-15 | CTNF |
Non-Final Rejection | 9 | View | |
| 2007-03-15 | 892 |
List of references cited by examiner | 1 | View | |
| 2007-03-15 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2007-03-15 | FWCLM |
Index of Claims | 1 | View | |
| 2007-02-28 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2007-02-08 | DISQ |
Terminal Disclaimer review decision | 1 | View | |
| 2006-09-27 | DIST |
Terminal Disclaimer Filed | 2 | View | |
| 2006-09-27 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2006-07-17 | CTNF |
Non-Final Rejection | 6 | View | |
| 2006-07-17 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2006-07-17 | 892 |
List of references cited by examiner | 3 | View | |
| 2006-07-17 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2006-07-17 | FWCLM |
Index of Claims | 1 | View | |
| 2006-07-17 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2006-07-10 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2005-07-18 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-07-18 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-07-18 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-07-08 | ELC. |
Response to Election / Restriction Filed | 2 | View | |
| 2005-05-17 | CTRS |
Requirement for Restriction/Election | 4 | View | |
| 2005-05-17 | FWCLM |
Index of Claims | 1 | View | |
| 2004-11-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-11-08 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2004-06-22 | TRNA |
Transmittal of New Application | 2 | View | |
| 2004-06-22 | SPEC |
Specification | 23 | View | |
| 2004-06-22 | CLM |
Claims | 6 | View | |
| 2004-06-22 | ABST |
Abstract | 1 | View | |
| 2004-06-22 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2004-06-22 | OATH |
Oath or Declaration filed | 4 | View | |
| 2004-06-22 | A.PE |
Preliminary Amendment | 1 | View | |
| 2004-06-22 | SPEC |
Specification | 6 | View | |
| 2004-06-22 | CLM |
Claims | 7 | View | |
| 2004-06-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 10 | View | |
| 2004-06-22 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 10 | View | |
| 2004-06-22 | FOR |
Foreign Reference | 10 | View | |
| 2004-06-22 | FOR |
Foreign Reference | 16 | View | |
| 2004-06-22 | FOR |
Foreign Reference | 15 | View | |
| 2004-06-22 | FOR |
Foreign Reference | 27 | View | |
| 2004-06-22 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2004-06-22 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-06-22 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-06-22 | 136A |
Authorization for Extension of Time all replies | 2 | View |
Inventors
Katsuhiro Takushima
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
716/21
G03F1/32
G03F1/72
Prosecution
- Examiner
- LEVIN, NAUM B
- Art Unit
- 2825
- Customer No.
- 26071
- Docket No.
- F98ED0659-CA-CA
- Confirmation No.
- 4061
Foreign Priority
11-207537
·
1999-07-22
·
JAPAN
Publication
- Pub. No.
- US20040229137A1
- Pub. Date
- 2004-11-18
Parent
is a Continuation of
→
App. 10/300,777
· US 6,800,214
Filed 2002-11-21
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
is a Continuation of
→
App. 09/618,641
· US 6,508,949
Filed 2000-07-18
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 10/872,464
- Filed
- 2004-06-22
- Pub. No.
- US20040229137A1
- Examiner
- LEVIN, NAUM B
- Art Unit
- 2825
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