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App. No. 10/307,407 · Confirmation No. 8469

BEAM-SPLITTER OPTICS DESIGN THAT MAINTAINS AN UNFLIPPED (UNMIRRORED) IMAGE FOR A CATADIOPTRIC LITHOGRAPHIC SYSTEM

Inventor: Harry Sewell
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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2004-03-08 IFEE Issue Fee Payment (PTO-85B) 4 View
2003-12-12 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-12-12 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-12-12 892 List of references cited by examiner 1 View
2003-12-12 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-12-12 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-12 FWCLM Index of Claims 1 View
2003-11-28 SRNT Examiner's search strategy and results 3 View
2003-04-08 TRNA Transmittal of New Application 4 View
2003-04-08 DRW Drawings-only black and white line drawings 6 View
2003-03-19 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-12-02 WFEE Fee Worksheet (SB06) 1 View
2002-12-02 WFEE Fee Worksheet (SB06) 1 View
2002-12-02 TRNA Transmittal of New Application 5 View
2002-12-02 ADS Application Data Sheet 1 View
2002-12-02 SPEC Specification 20 View
2002-12-02 CLM Claims 5 View
2002-12-02 ABST Abstract 1 View
2002-12-02 DRW Drawings-only black and white line drawings 6 View
2002-12-02 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/307,407
Filed
2002-12-02
Granted
2004-05-04
Art Unit
2851
PTA
0 days