IP Library › Granted Patent US 6,800,551
Granted Patent Utility
US 6,800,551 · Confirmation No. 2657

CHEMICAL AMPLIFICATION TYPE PHOTORESIST COMPOSITION, METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE USING THE COMPOSITION , AND SEMICONDUCTOR SUBSTRATE

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2004-08-31 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-06-03 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-03 NOA Notice of Allowance and Fees Due (PTOL-85) 5 View
2004-06-03 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-06-03 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-25 WFEE Fee Worksheet (SB06) 1 View
2004-05-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-05-12 SPEC Specification 1 View
2004-05-12 CLM Claims 8 View
2004-05-12 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2004-05-12 DRW Drawings-only black and white line drawings 1 View
2004-05-12 XT/ Extension of Time 1 View
2004-01-14 CTNF Non-Final Rejection 12 View
2004-01-14 892 List of references cited by examiner 1 View
2004-01-14 1449 List of References cited by applicant and considered by examiner 1 View
2004-01-14 FWCLM Index of Claims 1 View
2004-01-14 SRFW Search information including classification, databases and other search related notes 1 View
2004-01-07 SRNT Examiner's search strategy and results 3 View
2002-12-03 TRNA Transmittal of New Application 2 View
2002-12-03 ADS Application Data Sheet 4 View
2002-12-03 SPEC Specification 44 View
2002-12-03 CLM Claims 6 View
2002-12-03 ABST Abstract 1 View
2002-12-03 DRW Drawings-only black and white line drawings 9 View
2002-12-03 OATH Oath or Declaration filed 3 View
2002-12-03 TRNA Transmittal of New Application 2 View
2002-12-03 DRW Drawings-only black and white line drawings 9 View
2002-12-03 SPEC Specification 44 View
2002-12-03 CLM Claims 6 View
2002-12-03 ABST Abstract 1 View
2002-12-03 OATH Oath or Declaration filed 3 View
2002-12-03 WFEE Fee Worksheet (SB06) 1 View
2002-12-03 WFEE Fee Worksheet (SB06) 1 View
2002-12-03 ADS Application Data Sheet 4 View
2002-12-03 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-12-03 FOR Foreign Reference 11 View
2002-12-03 FOR Foreign Reference 9 View
2002-12-03 FOR Foreign Reference 27 View
2002-12-03 FOR Foreign Reference 33 View
2002-12-03 FOR Foreign Reference 38 View
2002-12-03 FOR Foreign Reference 5 View
2002-12-03 FOR Foreign Reference 26 View
2002-12-03 FOR Foreign Reference 7 View
2002-12-03 FOR Foreign Reference 39 View
2002-12-03 FRPR Certified Copy of Foreign Priority Application 49 View
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Quick Facts
Patent No.
US 6,800,551
App. No.
10/308,115
Filed
2002-12-03
Granted
2004-10-05
Pub. No.
US20030157806A1
Art Unit
2829
PTA
-28 days