IP Library › Granted Patent US 6,767,750
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US 6,767,750 · Confirmation No. 4110

DETECTION OF AIOX EARS FOR PROCESS CONTROL IN FERAM PROCESSING

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2004-05-17 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-03-24 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-03-24 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-03-24 SRFW Search information including classification, databases and other search related notes 1 View
2004-01-20 WFEE Fee Worksheet (SB06) 1 View
2003-12-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-12-29 CLM Claims 7 View
2003-12-29 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-11-20 CTNF Non-Final Rejection 4 View
2003-11-20 FWCLM Index of Claims 1 View
2003-11-20 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-01 WFEE Fee Worksheet (SB06) 1 View
2003-09-22 WFEE Fee Worksheet (SB06) 1 View
2003-07-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-07-15 CLM Claims 7 View
2003-07-15 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-06-20 CTNF Non-Final Rejection 7 View
2003-06-20 892 List of references cited by examiner 1 View
2003-06-20 1449 List of References cited by applicant and considered by examiner 2 View
2003-06-15 SRNT Examiner's search strategy and results 5 View
2003-06-13 SRNT Examiner's search strategy and results 4 View
2003-01-29 CFILE Request for Corrected Filing Receipt 2 View
2002-12-03 TRNA Transmittal of New Application 2 View
2002-12-03 SPEC Specification 63 View
2002-12-03 CLM Claims 7 View
2002-12-03 ABST Abstract 1 View
2002-12-03 DRW Drawings-only black and white line drawings 15 View
2002-12-03 OATH Oath or Declaration filed 3 View
2002-12-03 TRNA Transmittal of New Application 2 View
2002-12-03 WFEE Fee Worksheet (SB06) 1 View
2002-12-03 WFEE Fee Worksheet (SB06) 1 View
2002-12-03 FWCLM Index of Claims 1 View
2002-12-03 SRFW Search information including classification, databases and other search related notes 1 View
2002-12-03 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-12-03 DRW Drawings-only black and white line drawings 15 View
2002-12-03 SPEC Specification 63 View
2002-12-03 CLM Claims 7 View
2002-12-03 ABST Abstract 1 View
2002-12-03 OATH Oath or Declaration filed 3 View
2002-12-03 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
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Quick Facts
Patent No.
US 6,767,750
App. No.
10/308,384
Filed
2002-12-03
Granted
2004-07-27
Pub. No.
US20030124791A1
Art Unit
2823
PTA
0 days