Isolating phase change memories with schottky diodes and guard rings
View Patent ↗A phase change memory may be made using an isolation diode in the form of a Shottky diode between a memory cell and a word line. To reduce the leakage currents associated with the Shottky diode, a guard ring may be utilized.
1. A phase change memory comprising:
a substrate having a background doping level;
a phase change memory cell formed in said substrate; and
an isolation diode formed in said substrate in the form of a Schottky diode, said isolation diode including a guard ring formed in said substrate, and an isolation region completely surrounding said isolation diode so as to isolate said isolation diode from its surroundings, wherein said guard ring is formed between said substrate and said isolation region.
2. The memory of claim 1 wherein said isolation diode includes a metal contact.
3. The memory of claim 1 wherein said isolation diode includes a silicide contact.
4. The memory of claim 1 wherein the doping level of said Schottky diode is a background doping level.
5. The memory of claim 4 wherein said background doping level is less than or equal to 10 17 atoms per cubic centimeter.
6. The memory of claim 1 wherein said memory cell is coupled to a bitline and to said isolation diode and said isolation diode is connected to a word line.
7. The memory of claim 1 including an isolation diode coupled to a word line, said isolation diode including a substrate having a background doping level and said word line being a word line formed in said substrate, said word line including a doped region in said substrate.
8. A method comprising:
isolating a phase change memory cell using a Schottky diode formed in a semiconductor substrate having a background doping level; and
reducing leakage current in said Schottky diode using a guard ring and an isolation region surrounding said Schottky diode, said guard ring formed between said substrate and said isolation region.
9. The method of claim 8 including coupling said Schottky diode between a memory cell and a word line.
10. The method of claim 8 including forming said Schottky diode in a substrate having a doping level less than or equal to 10 17 atoms per cubic centimeter.
11. A system comprising:
a processor; and
a memory coupled to said processor, said memory including a substrate having a background doping level and a phase change memory cell formed on said substrate and an isolation diode in the form of a Schottky diode formed in said substrate, said Schottky diode including a guard ring and an isolation region completely surrounding said Schottky diode to isolate said Schottky diode from its surroundings, said guard ring formed between said substrate and said isolation region.
12. The system of claim 11 wherein said Schottky diode is formed in a substrate having a doping level less than or equal to 10 17 atoms per cubic centimeter.
13. The system of claim 11 including a word line, said diode coupled between the word line and the memory cell.