Electro-optical device and electronic equipment
An active matrix driven electro-optical device, such as a liquid crystal device, enabled to add sufficient storage capacitance to pixel electrodes and decrease the diameter of contact holes connecting with pixel electrodes even when a fine pixel pitch is employed. The liquid crystal device has TFTs, data lines, scanning lines, storage capacitor lines, and pixel electrodes provided on a TFT array substrate. Each of the pixel electrodes is electrically connected to one of the TFTs by two contact holes through a barrier layer. A part of a semiconductor layer and each of the capacitor lines sandwich a first dielectric film and constitute a first storage capacitor, while a part of the barrier layer and each of the capacitor lines sandwich a second dielectric film and constitute a second storage capacitor.
1. An electro-optical device, comprising:
a thin film transistor disposed corresponding to an intersection of a scanning line and a data line;
a capacitor line disposed in parallel with the scanning line;
a conductive layer disposed in an upper layer than a gate electrode of the thin film transistor via an insulator film;
a first contact hole electrically connected between the conductive layer and a drain region of a semiconductor of the thin film transistor;
a pixel electrode disposed in the upper layer than the conductive layer via an insulating film; and
a second contact hole electrically connected between the conductive layer and the pixel electrode,
a depth of the first contact hole being shallower than a depth of the second contact hole,
the first contact hole and the second contact hole being positioned between the scanning line and the capacitor line.
2. The electro-optical device according to claim 1 , a thickness of the conductive layer being larger than a thickness of a semiconductor layer of the thin film transistor.
3. The electrical electro-optical device according to claim 1 , a size of the first contact hole being smaller than a size of the second contact hole.
4. The electrical electra-optical device according to claim 1 , a region of the first contact hole which contacts the drain region of the semiconductor is smaller than a region of the second contact hole which contacts the conductive film.
5. An electronic equipment, comprising the electro-optical device recited in claim 1 .