IP Library › Granted Patent US 6,823,503
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US 6,823,503 · Confirmation No. 5360

METHOD AND APPARATUS FOR CREATING A PHASE-SHIFTING MASK FOR A PHOTOLITHOGRAPHIC PROCESS

Inventor: Kevin A. Beaudette
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2004-07-29 BIB Bibliographic Data Sheet 1 View
2004-07-29 SRFW Search information including classification, databases and other search related notes 1 View
2004-07-22 SRNT Examiner's search strategy and results 2 View
2004-06-16 WFEE Fee Worksheet (SB06) 1 View
2004-06-04 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-06-04 CLM Claims 9 View
2004-06-04 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-05-20 CTNF Non-Final Rejection 6 View
2004-05-20 892 List of references cited by examiner 1 View
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2002-12-31 TRNA Transmittal of New Application 2 View
2002-12-31 SPEC Specification 9 View
2002-12-31 CLM Claims 9 View
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Quick Facts
Patent No.
US 6,823,503
App. No.
10/334,566
Filed
2002-12-31
Granted
2004-11-23
Pub. No.
US20040128642A1
Examiner
SIEK, VUTHE
Art Unit
2825
PTA
0 days