Granted Patent
Utility
US 6,768,125
· Confirmation No. 1570
MASKLESS PARTICLE-BEAM SYSTEM FOR EXPOSING A PATTERN ON A SUBSTRATE
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Code | Description | Pages | ||
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| 2010-03-25 | RFN.REQ |
Refund Request | 6 | View | |
| 2010-03-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-02-24 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2010-02-24 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2010-02-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-02-17 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2010-02-17 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2010-02-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-02-17 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2005-01-28 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2004-08-17 | COCIN |
Request for Certificate of Correction | 3 | View | |
| 2004-06-01 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-04-08 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 8 | View | |
| 2004-04-08 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-04-08 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-04-08 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-04-08 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-04-08 | FWCLM |
Index of Claims | 1 | View | |
| 2004-03-31 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2004-01-31 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-01-31 | FWCLM |
Index of Claims | 1 | View | |
| 2004-01-08 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-01-08 | SPEC |
Specification | 1 | View | |
| 2004-01-08 | CLM |
Claims | 8 | View | |
| 2004-01-08 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2004-01-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 10 | View | |
| 2004-01-08 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2004-01-08 | FOR |
Foreign Reference | 20 | View | |
| 2004-01-08 | FOR |
Foreign Reference | 41 | View | |
| 2004-01-08 | FOR |
Foreign Reference | 17 | View | |
| 2004-01-08 | FOR |
Foreign Reference | 12 | View | |
| 2004-01-08 | FOR |
Foreign Reference | 7 | View | |
| 2004-01-08 | FOR |
Foreign Reference | 2 | View | |
| 2003-10-08 | CTNF |
Non-Final Rejection | 10 | View | |
| 2003-10-08 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-10-08 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-09-26 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2003-07-24 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2003-04-30 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2003-04-30 | OATH |
Oath or Declaration filed | 3 | View | |
| 2003-04-14 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 1 | View | |
| 2003-01-08 | TRNA |
Transmittal of New Application | 2 | View | |
| 2003-01-08 | SPEC |
Specification | 26 | View | |
| 2003-01-08 | CLM |
Claims | 4 | View | |
| 2003-01-08 | ABST |
Abstract | 1 | View | |
| 2003-01-08 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2003-01-08 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-01-08 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-01-08 | FWCLM |
Index of Claims | 1 | View | |
| 2003-01-08 | TRNA |
Transmittal of New Application | 2 | View | |
| 2003-01-08 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2003-01-08 | SPEC |
Specification | 26 | View | |
| 2003-01-08 | CLM |
Claims | 4 | View | |
| 2003-01-08 | ABST |
Abstract | 1 | View | |
| 2003-01-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-01-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-01-08 | FRPR |
Certified Copy of Foreign Priority Application | 36 | View | |
| 2003-01-08 | FRPR |
Certified Copy of Foreign Priority Application | 36 | View |
Inventors
Elmar Platzgummer
Vienna, AUSTRIA
Hans Loeschner
Vienna, AUSTRIA
Gerhard Stengl
Wernberg, AUSTRIA
Herbert Vonach
Klosterneuburg, AUSTRIA
Alfred Chalupka
Vienna, AUSTRIA
Gertraud Lammer
Vienna, AUSTRIA
Herbert Buschbeck
Vienna, AUSTRIA
Robert Nowak
Vienna, AUSTRIA
Till Windischbauer
Deutsch-Wagram, AUSTRIA
Attorneys & Agents of Record
Classification
USPC
250/492.23
B82Y10/00
H01J37/3174
B82Y40/00
H01J37/045
Prosecution
- Examiner
- KALIVODA, CHRISTOPHER M
- Art Unit
- 2881
- Docket No.
- 07089.0010
- Confirmation No.
- 1570
Foreign Priority
A 76/2002
·
2002-01-17
·
AUSTRALIA
A 434/2002
·
2002-03-21
·
AUSTRALIA
Publication
- Pub. No.
- US20030155534A1
- Pub. Date
- 2003-08-21
Patent Term Adjustment
0days
No related applications found.
from
BUSCHBECK, HERBERT,
CHALUPKA, ALFRED,
LAMMER, GERTRAUD,
LOESCHNER, HANS,
NOWAK, ROBERT,
PLATZGUMMER, ELMAR,
STENGL, GERHARD,
VONACH, HERBERT,
WINDISCHBAUER, TILL
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-04-30
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Quick Facts
- Patent No.
- US 6,768,125
- App. No.
- 10/337,903
- Filed
- 2003-01-08
- Granted
- 2004-07-27
- Pub. No.
- US20030155534A1
- Examiner
- KALIVODA, CHRISTOPHER M
- Art Unit
- 2881
- PTA
- 0 days
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