Patent Assignment
Reel/Frame 024055/0092
License
Recorded: 2010-03-10
Pages: 9
Assignor
IMS NANOFABRICATION AG
Executed: 2010-03-03
Assignee
INTEL CORPORATION
2200 MISSION COLLEGE BLVD., SANTA CLARA, CALIFORNIA, 95052
Covered Properties
(23)
Arrangement for Masked Beam Lithography by Means of Electrically Charged Particles
Patent:
5,742,062 →
Application:
08/598,081 →
Particle Beam, in Particular Ionic Optic Imaging System
Patent:
5,801,388 →
Application:
08/669,481 →
Arrangement for Shadow-Casting Lithography
Patent:
5,874,739 →
Application:
08/914,070 →
Particle-Optical Imaging System for Lithography Purposes
Patent:
6,326,632 →
Application:
09/417,633 →
Pattern Lock System
Maskless Particle-Beam System for Exposing a Pattern on a Substrate
Apparatus for Enhancing the Lifetime of Stencil Masks
Ion Irradiation of a Target at Very High and Very Low Kinetic Ion Energies
Particle-Optic Electrostatic Lens
Charged-Particle Multi-Beam Exposure Apparatus
Pattern-Definition Device for Maskless Particle-Beam Exposure Apparatus
Compensation of Magnetic Fields
Advanced Pattern Definition for Particle-Beam Processing
Particle-Optical Projection System
Pattern Lock System for Particle-Beam Exposure Apparatus
Charged-Particle Exposure Apparatus with Electrostatic Zone Plate
Charged-Particle Exposure Apparatus
Particle-Beam Apparatus with Improved Wien-Type Filter
Charged-Particle Exposure Apparatus
Method for Maskless Particle-Beam Exposure
Pattern Definition Device Having Distinct Counter-Electrode Array Plate
Multi-Beam Source
Particle-Beam Exposure Apparatus with Overall-Modulation of a Patterned Beam
Related Assignments
(22)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Oct 29, 1996
From: STENGL, GERHARD; CHALUPKA, ALFRED; VONACH, HERBERT
To: IMS-IONEN MIKROFABRIKATIONS SYSTEME GMBH
Reel/Frame 008198/0787 →
Assignment of Assignor's Interest
Aug 18, 1997
From: BUSCHBECK, HERBERT; CHALUPKA, ALFRED; LOESCHNER, HANS; STENGL, GERHARD
To: IMS-IONEN MIKROFABRIKATIONS SYSTEMS GMBH
Reel/Frame 008682/0558 →
Assignment of Assignor's Interest
Oct 14, 1999
From: BUSCHBECK, HERBERT; CHALUPKA, ALFRED; LAMMER, GERTRAUD; LOESCHNER, HANS
To: IMS-IONEN MIKROFABRIKATIONS SYSTEME GMBH
Reel/Frame 010344/0046 →
Assignment of Assignor's Interest
Sep 10, 2001
From: CHALUPKA, ALFRED; STENGL, GERHARD; LOSCHNER, HANS; NOWAK, ROBERT
To: IMS-IONEN MIKROFABRIKATIONS SYSETMS GMBH
Reel/Frame 012164/0389 →
Assignment of Assignor's Interest
Apr 30, 2003
From: PLATZGUMMER, ELMAR; LOESCHNER, HANS; STENGL, GERHARD; VONACH, HERBERT
To: IMS NANOFABRICATION GMBH
Reel/Frame 014008/0697 →
Assignment of Assignor's Interest
May 6, 2003
From: PLATZGUMMER, ELMAR; LOSCHNER, HANS; STENGL, GERHARD
To: IMS-IONEN MIKROFABRIKATIONS SYSTEME GMBH
Reel/Frame 014029/0480 →
Assignment of Assignor's Interest
Jul 7, 2004
From: PLATZGUMMER, ELMAR; STENGEL, GERHARD; LOESCHNER, HANS
To: IMS-IONEN MIKROFABRIKATIONS SYSTEME GMBH
Reel/Frame 015558/0348 →
Assignment of Assignor's Interest
Oct 27, 2004
From: LAMMER-PACHLINGER, WOLFGANG; LAMMER, GERTRAUD; CHALUPKA, ALFRED
To: IMS NANOFABRICATION GMBH
Reel/Frame 015939/0937 →
Assignment of Assignor's Interest
Dec 10, 2004
From: STENGL, GERHARD; BUSCHBECK, HERBERT; LAMMER, GERTRAUD
To: IMS NANOFABRICATION GMBH
Reel/Frame 016060/0967 →
Assignment of Assignor's Interest
Jan 15, 2005
From: STENGL, GERHARD; PLATZGUMMER, ELMAR; LOSCHNER, HANS
To: IMS NANOFABRICATION GMBH
Reel/Frame 016154/0072 →
Assignment of Assignor's Interest
Mar 2, 2005
From: BUSCHBECK, HERBERT; STENGL, GERHARD
To: IMS NANOFABRICATION GMBH
Reel/Frame 016357/0966 →
Assignment of Assignor's Interest
Mar 8, 2005
From: FORMAN, GEORGE H; SUERMONDT, HENRI JACQUES; STINGER, JAMES R
To: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
Reel/Frame 015853/0747 →
Assignment of Assignor's Interest
Jun 27, 2005
From: PLATZGUMMER, ELMAR; CERNUSCA, STEFAN
To: IMS NANOFABRICATION GMBH
Reel/Frame 016716/0500 →
Assignment of Assignor's Interest
Aug 13, 2007
From: PLATZGUMMER, ELMAR; CEMUSCA, STEFAN
To: IMS NANOFABRICATION AG
Reel/Frame 019687/0936 →
Assignment of Assignor's Interest
Aug 21, 2007
From: PLATZGAMMER, ELMAR; CERNUSCA, STEFAN; STENGL, GERHARG
To: IMS NANOFABRICATION AG
Reel/Frame 019722/0796 →
Assignment of Assignor's Interest
Oct 1, 2007
From: IMS-IONEN MIKROFABRIKATIONS SYSTEME GMBH
To: IMS NANOFABRICATION AG
Reel/Frame 019899/0339 →
Assignment of Assignor's Interest
Mar 10, 2008
From: PLATZGUMMER, ELMAR
To: IMS NANOFABRICATION AG
Reel/Frame 020621/0110 →
Corrective Assignment to Correct the Second Inventor's Surname. It Should Read Stefan Cernusca Previously Recorded on Reel 019687 Frame 0936. Assignor(S) Hereby Confirms the Assignee.
Jul 31, 2008
From: PLATZGUMMER, ELMAR; CERNUSCA, STEFAN
To: IMS NANOFABRICATION AG
Reel/Frame 021321/0678 →
Assignment of Assignor's Interest
Nov 26, 2008
From: STENGL, GERHARD; BUSCHBECK, HERBERT; NOWAK, ROBERT
To: IMS NANOFABRICATION AG
Reel/Frame 021894/0107 →
Change of Name
Dec 21, 2017
From: IMS NANOFABRICATION AG
To: IMS NANOFABRICATION GMBH
Reel/Frame 046070/0085 →
Change of Name
Jan 29, 2018
From: IMS NANOFABRICATION AG
To: IMS NANOFABRICATION GMBH
Reel/Frame 045185/0484 →
Assignment of Assignor's Interest
Jun 13, 2024
From: IMS NANOFABRICATION GMBH
To: IMS NANOFABRICATION GMBH
Reel/Frame 067724/0838 →