Patent Assignment
Reel/Frame 016154/0072
Assignment of Assignor's Interest
Recorded: 2005-01-15
Pages: 3
Assignors
STENGL, GERHARD
Executed: 2004-10-28
PLATZGUMMER, ELMAR
Executed: 2004-10-28
LOSCHNER, HANS
Executed: 2004-10-28
Assignee
IMS NANOFABRICATION GMBH
SCHREYGASSE 3, 1020 VIENNA, AUSTRALIA
Covered Property
(1)
Charged-Particle Multi-Beam Exposure Apparatus
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.