Granted Patent
Utility
US 6,768,118
· Confirmation No. 1050
ELECTRON BEAM MONITORING SENSOR AND ELECTRON BEAM MONITORING METHOD
Inventors:
Yoshinori Nakayama, Yasunari Sohda, Hiroya Ohta, Norio Saitou, Masato Muraki, Masaki Takakuwa
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Code | Description | Pages | ||
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| 2004-06-03 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 1 | View | |
| 2004-05-26 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-05-26 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2004-05-26 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2004-05-26 | C.AD |
Change of Address | 1 | View | |
| 2004-03-19 | FRPR |
Certified Copy of Foreign Priority Application | 34 | View | |
| 2004-03-17 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-03-17 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2004-03-17 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 2 | View | |
| 2004-03-17 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-03-17 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-03-17 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-03-17 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-03-17 | FWCLM |
Index of Claims | 1 | View | |
| 2004-03-08 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2004-02-12 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-01-24 | TRNA |
Transmittal of New Application | 1 | View | |
| 2003-01-24 | ADS |
Application Data Sheet | 1 | View | |
| 2003-01-24 | SPEC |
Specification | 19 | View | |
| 2003-01-24 | CLM |
Claims | 3 | View | |
| 2003-01-24 | ABST |
Abstract | 1 | View | |
| 2003-01-24 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2003-01-24 | OATH |
Oath or Declaration filed | 5 | View | |
| 2003-01-24 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2003-01-24 | FOR |
Foreign Reference | 6 | View | |
| 2003-01-24 | FOR |
Foreign Reference | 6 | View | |
| 2003-01-24 | FOR |
Foreign Reference | 5 | View | |
| 2003-01-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-01-24 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Yoshinori Nakayama
Sayama, JAPAN
Yasunari Sohda
Kawasaki, JAPAN
Hiroya Ohta
Kodaira, JAPAN
Norio Saitou
Tokorozawa, JAPAN
Masato Muraki
Inagi, JAPAN
Masaki Takakuwa
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
250/397
H01J37/244
H01J2237/24405
H01J2237/31774
Prosecution
- Examiner
- GILL, ERIN-MICHAEL
- Art Unit
- 2881
- Customer No.
- 24956
- Docket No.
- NIT-360
- Confirmation No.
- 1050
Foreign Priority
2002-231208
·
2002-08-08
·
JAPAN
Publication
- Pub. No.
- US20040026627A1
- Pub. Date
- 2004-02-12
Patent Term Adjustment
-131days
No related applications found.
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Quick Facts
- Patent No.
- US 6,768,118
- App. No.
- 10/350,188
- Filed
- 2003-01-24
- Granted
- 2004-07-27
- Pub. No.
- US20040026627A1
- Examiner
- GILL, ERIN-MICHAEL
- Art Unit
- 2881
- PTA
- -131 days
External Links