Exhaust apparatus and control method for same, and vacuum-use hydrostatic bearing
View Patent ↗An exhaust apparatus for a differential exhaust mechanism having a labyrinth seal and a plurality of vacuum pockets includes a differential exhaust system for evacuating the vacuum pockets and an exhaust system for evacuating a chamber of exhaust gas. The differential exhaust system and the exhaust system are connected by control valves that can be opened and closed, enabling communication between the vacuum pockets and the interior of the chamber to be opened and closed (or connected and disconnected) as well. The valves are opened when a vacuum is being formed inside the chamber or when a malfunction occurs in the exhaust system, thus connecting the vacuum pockets and the chamber and preventing excessive pressure from building up on the hydrostatic bearing.
1. An exhaust apparatus for a differential exhaust mechanism having a labyrinth seal and a vacuum pocket, comprising:
exhaust means for exhausting the vacuum pocket;
a connective mechanism adapted to connect and disconnect the vacuum pocket with a peripheral space of the differential exhaust mechanism; and
control means for controlling connection and disconnection of the connective mechanism.
2. The exhaust apparatus of claim 1 , further comprising a chamber that surrounds the differential exhaust mechanism and forms the peripheral space, wherein the connective mechanism connects an exhaust passage of the exhaust means to the chamber via a valve whose operation is controlled by the control means.
3. The exhaust apparatus of claim 2 , wherein the valve is a normal open type.
4. The exhaust apparatus of claim 2 , wherein the control means places the valve in a connective state from commencement of formation of a vacuum inside the chamber to attainment of a certain vacuum degree inside the chamber.
5. The exhaust apparatus of claim 2 , wherein the control means comprises pressure measurement means for measuring pressure inside the chamber and pressure in the vacuum pocket and controls the operation of the valve according to results of pressure measurements obtained by the pressure measurement means.
6. The exhaust apparatus of claim 5 , wherein the control means opens the valve when the results of pressure measurements obtained by the pressure measurement means indicate that a pressure differential between the inside of the chamber and the vacuum pocket exceeds a certain value.
7. The exhaust apparatus of claim 2 , wherein the control means comprises oscillation detection means for detecting oscillation of the differential exhaust mechanism and controls the operation of the valve according to oscillation detection results obtained by the oscillation detection means.
8. The exhaust apparatus of claim 7 , wherein the control means closes the valve when the oscillation detection means detects oscillation of the differential exhaust mechanism.
9. The exhaust apparatus of claim 2 , wherein the control means closes the valve when a malfunction of the apparatus is detected including a malfunction of the differential exhaust mechanism.
10. An exhaust apparatus for a differential exhaust mechanism having a labyrinth seal and a vacuum pocket, comprising:
exhaust means for exhausting the vacuum pocket; and
a connective mechanism adapted to connect and disconnect the vacuum pocket with a peripheral space of the differential exhaust mechanism depending on a pressure differential between the vacuum pocket and the peripheral space of the differential exhaust mechanism.
11. The exhaust apparatus of claim 10 , wherein the connective mechanism provides a check valve on a passage that connects the vacuum pocket and the peripheral space.
12. A hydrostatic bearing for inside a chamber, formed by combining the exhaust apparatus of claim 11 with a hydrostatic bearing.
13. A control method for controlling an exhaust apparatus, the apparatus comprising:
exhaust means for exhausting a vacuum pocket, the exhaust means being connected to a differential exhaust mechanism having a labyrinth seal and the vacuum pocket; and
a connective mechanism for connecting and disconnecting the vacuum pocket with a peripheral space of the differential exhaust mechanism,
the control method comprising:
a control step of connecting and disconnecting the connective mechanism depending on the state of the exhaust apparatus.