Gate electrode and method of fabricating the same
View Patent ↗There is provided a method of fabricating a gate electrode, including the steps of (a) forming a gate oxide film at a surface of a semiconductor substrate, (b) forming a multi-layered structure on the gate oxide film, the multi-layered structure including a polysilicon layer formed on the gate oxide film, a refractive metal silicide layer formed on the polysilicon layer, and a silicon nitride layer formed on the refractive metal silicide layer, (c) thermally annealing the multi-layered structure in a nitrogen atmosphere to thereby form a silicon nitride film on sidewalls of the polysilicon layer and the refractive metal silicide layer, and (d) oxidizing the semiconductor substrate and the multi-layered structure.
1. A method of fabricating a gate electrode comprising the steps of:
(a) forming a gate oxide film at a surface of a semiconductor substrate;
(b) forming a multi-layered structure on said gate oxide film, said multi-layered structure including a polysilicon layer formed on said gate oxide film, a refractive metal silicide layer formed on said polysilicon layer, and a silicon nitride layer formed on said refractive metal silicide layer;
(c) thermally annealing said multi-layered structure in a nitrogen atmosphere and forming a silicon nitride film only on sidewalls of said polysilicon layer and said refractive metal silicide layer; and
(d) rapidly thermally oxidizing said semiconductor substrate and said multi-layered structure after said step (c) so that said silicon nitride film prevents penetration of oxygen into said polysilicon layer and said refractive metal silicide layer.
2. The method as set forth in claim 1 , wherein a refractive metal layer is further formed between said refractive metal silicide layer and said silicon nitride layer in said step (b).
3. The method as set forth in claim 2 , wherein said refractive metal layer is composed of any one of tungsten (W), molybdenum (Mo), titanium (Ti) and tantalum (Ta).
4. The method as set forth in claim 1 , wherein said refractive metal silicide layer is composed of any one of WSi 2 , TiSi 2 , VSi 2 , CrSi 2 , ZrSi 2 , NbSi 2 , MoSi 2 , TaSi 2 , CoSi 2 and PdSi.
5. The method as set forth in claim 1 , wherein said nitrogen atmosphere contains impurity other than nitrogen at 1 volume percent or smaller.
6. The method as set forth in claim 5 , wherein said impurity is oxygen.
7. The method as set forth in claim 1 , wherein said multi-layered structure is thermally annealed in said step (c) at 1050 to 1100 degrees centigrade both inclusive.