IP Library › Granted Patent US 6,791,679
Granted Patent Utility
US 6,791,679 · Confirmation No. 6905

ADAPTIVE CORRELATION OF PATTERN RESIST STRUCTURES USING OPTICAL METROLOGY

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2009-05-05 C.AD Change of Address 4 View
2004-07-29 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-06-25 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-25 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-25 892 List of references cited by examiner 1 View
2004-06-25 FWCLM Index of Claims 1 View
2004-06-25 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-06-25 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-01 WFEE Fee Worksheet (SB06) 1 View
2004-04-01 FWCLM Index of Claims 1 View
2004-03-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-03-24 CLM Claims 9 View
2004-03-24 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-12-24 CTNF Non-Final Rejection 18 View
2003-12-24 892 List of references cited by examiner 1 View
2003-12-24 SRFW Search information including classification, databases and other search related notes 1 View
2003-08-25 ELC. Response to Election / Restriction Filed 4 View
2003-08-13 CTRS Requirement for Restriction/Election 5 View
2003-02-04 TRNA Transmittal of New Application 2 View
2003-02-04 ADS Application Data Sheet 1 View
2003-02-04 SPEC Specification 20 View
2003-02-04 CLM Claims 11 View
2003-02-04 ABST Abstract 1 View
2003-02-04 DRW Drawings-only black and white line drawings 10 View
2003-02-04 OATH Oath or Declaration filed 7 View
2003-02-04 WFEE Fee Worksheet (SB06) 2 View
2003-02-04 WFEE Fee Worksheet (SB06) 1 View
2003-02-04 TRNA Transmittal of New Application 4 View
2003-02-04 ADS Application Data Sheet 1 View
2003-02-04 SPEC Specification 20 View
2003-02-04 CLM Claims 11 View
2003-02-04 ABST Abstract 1 View
2003-02-04 DRW Drawings-only black and white line drawings 10 View
2003-02-04 OATH Oath or Declaration filed 6 View
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Quick Facts
Patent No.
US 6,791,679
App. No.
10/358,782
Filed
2003-02-04
Granted
2004-09-14
Pub. No.
US20040152221A1
Art Unit
2812
PTA
0 days