Semiconductor stress buffer coating edge bead removal compositions and method for their use
View Patent ↗An edge bead remover composition that includes at least one ketone selected from the group consisting of: wherein R 1 and R 2 are independently selected from the group consisting of: methyl, ethyl, n-propyl, n-butyl, sec-butyl, and isobutyl, and wherein n equals 1 or 2; at least one ester other than lactones; and at least one lactone.
1. An edge bead remover composition comprising:
at least one ketone selected from the group consisting of:
wherein R 1 and R 2 are independently selected from the group consisting of:
methyl, ethyl, n-propyl, and combinations thereof, wherein n equals 1 or 2, and wherein said ketone of said Formula 1 has a total of 4 to 5 carbon atoms;
at least one ester other than lactones; and
at least one lactone;
wherein said at least one ketone is 2-pentanone, present in an amount between 35 wt. % to 50 wt. %; said at least one ester is ethyl lactate, present in an amount between 35 wt. % to 50 wt. %; and said at least one lactone is gamma-butyrolactone, present in an amount between 20 wt. % to 30 wt. %.