Patent Application
Utility
App. No. 10/366,078
· Confirmation No. 9020
SYSTEM, PROCESS, APPARATUS AND PROGRAM FOR CONTROLLING SPECIAL LOT CARRYING IN SEMICONDUCTOR CARRYING FACILITY
Inventor:
Hiroshi Nakashima
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-07-14 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-02-13 | TRNA |
Transmittal of New Application | 5 | View | |
| 2003-02-13 | A.PE |
Preliminary Amendment | 2 | View | |
| 2003-02-13 | SPEC |
Specification | 39 | View | |
| 2003-02-13 | CLM |
Claims | 17 | View | |
| 2003-02-13 | ABST |
Abstract | 1 | View | |
| 2003-02-13 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2003-02-13 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Hiroshi Nakashima
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
700/109
H10P72/0611
H10P72/50
Y02P90/02
G05B19/4189
Prosecution
- Examiner
- MASINICK, MICHAEL D
- Art Unit
- 6221
- Customer No.
- 27667
- Docket No.
- NEC 187 DIV
- Confirmation No.
- 9020
Foreign Priority
2000-027765
·
2000-02-04
·
JAPAN
Publication
- Pub. No.
- US20030125832A1
- Pub. Date
- 2003-07-03
Patent Term Adjustment
0days
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 10/366,078
- Filed
- 2003-02-13
- Granted
- 2003-09-09
- Pub. No.
- US20030125832A1
- Examiner
- MASINICK, MICHAEL D
- Art Unit
- 6221
- PTA
- 0 days
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