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App. No. 09/775,903 · Confirmation No. 8175

SYSTEM, PROCESS, APPARATUS AND PROGRAM FOR CONTROLLING SPECIAL LOT CARRYING IN SEMICONDUCTOR CARRYING FACILITY

Inventor: Hiroshi Nakashima
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-02-02 TRNA Transmittal of New Application 1 View
2001-02-02 SPEC Specification 39 View
2001-02-02 CLM Claims 17 View
2001-02-02 ABST Abstract 1 View
2001-02-02 DRW Drawings-only black and white line drawings 12 View
2001-02-02 OATH Oath or Declaration filed 2 View
2001-02-02 TRNA Transmittal of New Application 1 View
2001-02-02 SPEC Specification 39 View
2001-02-02 CLM Claims 17 View
2001-02-02 ABST Abstract 1 View
2001-02-02 DRW Drawings-only black and white line drawings 12 View
2001-02-02 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
09/775,903
Filed
2001-02-02
Granted
2003-07-08
Pub. No.
US20010012970A1
Art Unit
6221
PTA
-30 days