User interface for a networked-based mask defect printability analysis system
View Patent ↗Mask simulation tools are typically extremely complicated to learn and to use effectively. Therefore, providing access to a mask simulation tool over a wide area network (WAN) to multiple on-line users can be very cost effective. Specifically, in a network-based simulation server, multiple users can view the same mask image, simulations, and analysis results and provide real-time comments to each other as simulation and analysis are performed, thereby encouraging invaluable problem-solving dialogue among users. The user interface for this mask simulation tool can advantageously facilitate this dialogue. For example, the user interface can include an enter box for a user to enter a message and a talk box for capturing any message sent by any user of the simulation tool using the enter box.
1. A user interface for an application accessible over a wide area network (WAN), the user interface including:
an enter box for a user of the application to enter a message;
a talk box for capturing any message transferred by any user of the application using the enter box, thereby allowing real-time communication between users of the application over the WAN;
a viewing area for providing information relating to the application, wherein the enter box, the talk box, and the viewing area comprise an integrated environment for users of the application over the WAN; and
import menu icon for importing a predetermined file over the WAN, wherein the predetermined file includes a mask image, wherein a screen activated by the import menu icon requests at least one of a file name, a mask identification number, and a defect identification number.
2. A user interface for an application accessible over a wide area network (WAN), the user interface including:
an enter box for a user of the application to enter a message;
a talk box for capturing any message transferred by any user of the application using the enter box, thereby allowing real-time communication between users of the application over the WAN;
a viewing area for providing information relating to the application, wherein the enter box, the talk box, and the viewing area comprise an integrated environment for users of the application over the WAN; and
edit icon for at least one of reviewing, entering, and editing information regarding at least one of a stepper, a photoresist, and an etching process, wherein the edit icon provides access to a diagram of the stepper.
3. A user interface for an application accessible over a wide area network (WAN), the user interface including:
an enter box for a user of the application to enter a message;
a talk box for capturing any message transferred by any user of the application using the enter box, thereby allowing real-time communication between users of the application over the WAN;
a viewing area for providing information relating to the application, wherein the enter box, the talk box, and the viewing area comprise an integrated environment for users of the application over the WAN; and
a simulation icon for initiating a simulation, wherein the simulation icon includes means for identifying an image to be simulated and means for generating a one-dimensional plot from the image, wherein the one-dimensional plot includes at least one of a graph plotting aerial image intensity versus position and a graph plotting process latitudes.
4. The user interface of claim 3 , wherein the image includes a defect image and a reference image corresponding to the defect image.
5. The user interface of claim 4 , wherein the simulation icon further includes means for comparing a simulated defect image and a simulated reference image.
6. A user interface for an application accessible over a wide area network (WAN), the user interface including:
an enter box for a user of the application to enter a message;
a talk box for capturing any message transferred by any user of the application using the enter box, thereby allowing real-time communication between users of the application over the WAN;
a viewing area for providing information relating to the application, wherein the enter box, the talk box, and the viewing area comprise an integrated environment for users of the application over the WAN; and
a simulation icon for initiating a simulation, wherein the simulation icon includes means for identifying an image to be simulated and means for creating at least one of a simulation template and a test template.
7. The user interface of claim 6 , wherein the means for creating includes means for generating a script for a predetermined simulation.
8. The user interface of claim 6 , wherein the means for creating includes means for generating a script for a predetermined test.