Patent Application
Utility
App. No. 10/375,072
· Confirmation No. 6234
PARTICLE IMPLANTATION APPARATUS AND PARTICLE IMPLANTATION METHOD
Inventor:
Takatoshi Yamashita
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
View Patent ↗
View Publication ↗
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-11-16 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-09-01 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2004-09-01 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-09-01 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-09-01 | FWCLM |
Index of Claims | 1 | View | |
| 2004-09-01 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-07-27 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-07-27 | CLM |
Claims | 3 | View | |
| 2004-07-27 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2004-07-27 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-05-27 | CTNF |
Non-Final Rejection | 6 | View | |
| 2004-05-27 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-05-27 | FWCLM |
Index of Claims | 1 | View | |
| 2004-05-27 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-05-24 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2004-03-02 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-03-28 | M852 |
Letter to Official Draftsman Filed P/E | 1 | View | |
| 2003-03-28 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2003-02-28 | TRNA |
Transmittal of New Application | 2 | View | |
| 2003-02-28 | SPEC |
Specification | 16 | View | |
| 2003-02-28 | CLM |
Claims | 3 | View | |
| 2003-02-28 | ABST |
Abstract | 1 | View | |
| 2003-02-28 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2003-02-28 | OATH |
Oath or Declaration filed | 1 | View | |
| 2003-02-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-02-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-02-28 | FRPR |
Certified Copy of Foreign Priority Application | 23 | View |
Inventors
Takatoshi Yamashita
Kyoto, JAPAN
Attorneys & Agents of Record
Classification
USPC
204/192.11
C23C14/48
C23C14/46
H01J37/3171
H01J2237/3146
Prosecution
- Examiner
- VERSTEEG, STEVEN H
- Art Unit
- 1753
- Docket No.
- 03327.2299
- Confirmation No.
- 6234
Foreign Priority
P. 2002-056187
·
2002-03-01
·
JAPAN
Publication
- Pub. No.
- US20030164287A1
- Pub. Date
- 2003-09-04
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-03-17
from
YAMASHITA, TAKATOSHI
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-28
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 10/375,072
- Filed
- 2003-02-28
- Granted
- 2004-12-28
- Pub. No.
- US20030164287A1
- Examiner
- VERSTEEG, STEVEN H
- Art Unit
- 1753
- PTA
- 0 days
External Links