Film forming apparatus, substrate for forming oxide thin film, and production method thereof
View Patent ↗The invention provides a film forming apparatus that is capable of forming films sequentially with two types of film forming mechanisms in the same chamber. The film forming apparatus according to the present invention includes a Pt target disposed at one side within a film forming chamber, a sputtering output mechanism to supplying to the Pt target, a Pt vapor deposition source disposed at an other side within the film forming chamber, vapor deposition output mechanism to supply to the Pt vapor deposition source, a substrate holder disposed between the Pt target and the Pt vapor deposition source within the film forming chamber to mount a substrate, a rotating mechanism to move the substrate holder so that the substrate directs to the Pt target or to the Pt vapor deposition source, a heating mechanism to heat the substrate when the substrate is subjected to a sputtering film forming, and a cooling mechanism to cool the substrate when the substrate is subjected to vapor deposition film forming.
1. An apparatus to form a film, comprising:
a film forming chamber;
a substrate holder disposed within the film forming chamber to mount a substrate;
a first film forming mechanism disposed within the film forming chamber to form a first electrode thin film on the substrate;
a heating mechanism to heat the substrate when the substrate is subjected to sputtering film forming;
a second film forming mechanism disposed within the film forming chamber to form a second electrode thin film on the first electrode thin film; and
a cooling mechanism to cool the substrate when the substrate is subjected to vapor deposition film forming.
2. An apparatus to form a film, comprising:
a film forming chamber;
a substrate holder disposed within the film forming chamber to mount a substrate;
a sputtering film forming mechanism disposed within the film forming chamber to form a first electrode thin film on the substrate by sputtering;
a heating mechanism to heat the substrate when the substrate is subjected to sputtering film forming;
a vapor deposition film forming mechanism disposed within the film forming chamber to form a second electrode thin film on the first electrode thin film; and
a cooling mechanism to cool the substrate when the substrate is subjected to vapor deposition film forming.
3. The film forming apparatus as claimed in claim 2 , the first electrode thin film being at least one of a Pt electrode thin film, an Ir electrode thin film and a Ru electrode thin film, and the second electrode thin film being at least one of a Pt electrode thin film, an Ir electrode thin film and a Ru electrode thin film.
4. An apparatus to form a film, comprising:
a film forming chamber;
an electrode target including at least one of Pt, Ir and Ru disposed at one side within the film forming chamber;
a sputtering output mechanism to supply to the electrode target;
an electrode vapor deposition source including at least one of Pt, Ir and Ru disposed at another side within the film forming chamber;
a vapor deposition output mechanism to supply to the electrode vapor deposition source;
a substrate holder disposed between the electrode target and the electrode vapor deposition source within the film forming chamber to mount a substrate;
a driving mechanism to move the substrate holder so that the substrate directs to the electrode target or to the electrode vapor deposition source;
a heating mechanism to heat the substrate when the substrate is subjected to a sputtering film forming;
an oxidizing gas supplying mechanism to supply an oxidizing gas to the film forming chamber; and
a cooling mechanism to cool the substrate when the substrate is subjected to vapor deposition film forming.
5. A film forming apparatus, comprising:
a film forming chamber;
an electrode target including at least one of Pt, Ir and Ru disposed at one side within the film forming chamber;
a sputtering output mechanism to supply to the electrode target;
an electrode vapor deposition source including at least one of Pt, Ir and Ru disposed at one side within the film forming chamber;
a vapor deposition output mechanism to supply to the electrode vapor deposition source;
a substrate holder disposed at another side within the film forming chamber to mount a substrate;
a heating mechanism to heat the substrate when the substrate is subjected to sputtering film forming;
an oxidizing gas supplying mechanism to supply an oxidizing gas to the film forming chamber; and
a cooling mechanism to cool the substrate when the substrate is subjected to vapor deposition film forming.
6. A method of producing an oxide thin film forming substrate, comprising:
forming a first electrode thin film including at least one of Pt, Ir and Ru on a substrate at a substrate temperature ranging from room temperature to 650° C. by sputtering;
heating the substrate when the substrate is subjected to sputtering film forming;
forming a second electrode thin film including at least one of Pt, Ir and Ru on the first electrode thin film at substrate temperature not exceeding 350° C. by vapor deposition; and
cooling the substrate when the substrate is subjected to vapor deposition film forming.