Optical semiconductor module and method of producing the same
An optical semiconductor module having a large endothermic amount of an electronic cooling element can be provided, even if the area of the bottom plate of a package is the same. A package 11 includes two or more units of electronic cooling element 16 mounted therein. Each unit of the electronic cooling element is inserted through the space between inner juts 14 a of ceramic feedthrough of the package 11 and a bottom plate 13 , and is fixed to the bottom plate. The plural units of electronic cooling element are connected in series by one or more copper piece. The total area of junction between the two or more units of electronic cooling element and the bottom plate area of the package 11 occupies 75% or more of the area of the bottom plate. Thus, the ratio of the area of junction between the bottom plate and the electronic cooling element as a whole to the area of the bottom plate of the package can be increased.
1. An optical semiconductor module comprising:
a package whose frame has ceramic feedthrough;
two or more units of electronic cooling element connected to the bottom plate of said package; and
an optical semiconductor device mounted on said two or more units of electronic cooling element.
2. An optical semiconductor module according to claim 1 , wherein the area of junction between said two or more units of electronic cooling element and the bottom plate of said package occupies 75% or more of the area of the bottom plate.
3. An optical semiconductor module according to claim 2 , wherein said two or more units of electronic cooling element are connected in series by one or more copper piece.
4. An optical semiconductor module according to claim 1 , wherein said two or more units of electronic cooling element are connected in series by one or more copper piece.
5. A manufacturing method of an optical semiconductor module, comprising the steps of:
fixing two or more units of electronic cooling element to the bottom plate of a package whose frame has ceramic feedthrough; and
mounting an optical semiconductor device on said two or more units of electronic cooling element.
6. A manufacturing method of an optical semiconductor module according to claim 5 , wherein said two or more units of electronic cooling element are connected in series with one or more copper piece.
7. A manufacturing method of an optical semiconductor module according to claim 6 , wherein said step of fixing two or more units of electronic cooling element to the bottom plate of a package and a step of connecting said two or more units of electronic cooling element with one or more copper piece are carried out simultaneously using the same solder.
8. A manufacturing method of an optical semiconductor module according to claim 5 , wherein said step of fixing two or more units of electronic cooling element to the bottom plate of a package and a step of connecting said two or more units of electronic cooling element with one or more copper piece are carried out simultaneously using the same solder.