IP Library › Patent Application 10390918
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App. No. 10/390,918 · Confirmation No. 4860

SEMICONDUCTOR MANUFACTURING LINE MONITORING SYSTEM

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2004-04-21 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-03-19 TRNA Transmittal of New Application 2 View
2003-03-19 ADS Application Data Sheet 4 View
2003-03-19 A.PE Preliminary Amendment 14 View
2003-03-19 SPEC Specification 34 View
2003-03-19 CLM Claims 4 View
2003-03-19 ABST Abstract 1 View
2003-03-19 DRW Drawings-only black and white line drawings 43 View
2003-03-19 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/390,918
Filed
2003-03-19
Granted
2004-06-29
Pub. No.
US20040073327A1
Art Unit
2125
PTA
0 days