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App. No. 10/391,383 · Confirmation No. 4555

Inductively coupled plasma generation system with a parallel antenna array having evenly distributed power input and ground nodes

Inventors: Harqkyun Kim, Yunju Ra
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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Code Description Pages PDF
2009-07-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-07-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-06-29 PA.. Power of Attorney 3 View
2009-06-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-06-05 ABN Abandonment 2 View
2006-01-24 LET. Miscellaneous Incoming Letter 3 View
2005-09-08 CTAV Advisory Action (PTOL-303) 3 View
2005-08-29 A.NE Response After Final Action 1 View
2005-08-29 CLM Claims 5 View
2005-08-29 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2005-08-29 XT/ Extension of Time 2 View
2005-08-29 LET. Miscellaneous Incoming Letter 1 View
2005-08-29 WFEE Fee Worksheet (SB06) 1 View
2005-08-24 CTFR Final Rejection 14 View
2005-08-24 892 List of references cited by examiner 1 View
2005-08-24 SRFW Search information including classification, databases and other search related notes 1 View
2005-06-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2005-06-10 SPEC Specification 2 View
2005-06-10 CLM Claims 4 View
2005-06-10 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2005-06-10 DRW Drawings-only black and white line drawings 6 View
2005-06-10 WFEE Fee Worksheet (SB06) 1 View
2005-03-08 CTNF Non-Final Rejection 16 View
2005-03-08 892 List of references cited by examiner 1 View
2005-03-08 BIB Bibliographic Data Sheet 1 View
2005-03-08 SRFW Search information including classification, databases and other search related notes 1 View
2005-02-22 SRNT Examiner's search strategy and results 1 View
2003-03-18 TRNA Transmittal of New Application 2 View
2003-03-18 SPEC Specification 11 View
2003-03-18 CLM Claims 3 View
2003-03-18 ABST Abstract 1 View
2003-03-18 DRW Drawings-only black and white line drawings 6 View
2003-03-18 OATH Oath or Declaration filed 2 View
2003-03-18 WCLM Claims Worksheet (PTO-2022) 1 View
2003-03-18 WFEE Fee Worksheet (SB06) 1 View
2003-03-18 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/391,383
Filed
2003-03-18
Pub. No.
US20040182319A1
Art Unit
1763