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App. No. 10/396,148 · Confirmation No. 6366

Sputtering target for depositing silicon layers in their nitride or oxide form and process for its preparation

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2005-08-01 ABN Abandonment 2 View
2005-01-10 CTFR Final Rejection 10 View
2005-01-10 FWCLM Index of Claims 1 View
2005-01-10 SRFW Search information including classification, databases and other search related notes 1 View
2004-12-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-12-10 SPEC Specification 2 View
2004-12-10 CLM Claims 2 View
2004-12-10 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2004-12-10 LET. Miscellaneous Incoming Letter 1 View
2004-12-10 XT/ Extension of Time 2 View
2004-12-10 WFEE Fee Worksheet (SB06) 1 View
2004-12-10 FWCLM Index of Claims 1 View
2004-08-05 A.PE Preliminary Amendment 2 View
2004-08-05 CLM Claims 2 View
2004-08-05 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-08-03 CTNF Non-Final Rejection 9 View
2004-08-03 1449 List of References cited by applicant and considered by examiner 1 View
2004-08-03 892 List of references cited by examiner 1 View
2004-08-03 FWCLM Index of Claims 1 View
2004-08-03 BIB Bibliographic Data Sheet 2 View
2004-08-03 SRFW Search information including classification, databases and other search related notes 1 View
2004-07-28 SRNT Examiner's search strategy and results 1 View
2003-07-07 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-07-07 FOR Foreign Reference 7 View
2003-07-07 FOR Foreign Reference 4 View
2003-07-07 FOR Foreign Reference 18 View
2003-07-07 FOR Foreign Reference 38 View
2003-07-07 FOR Foreign Reference 15 View
2003-07-07 FOR Foreign Reference 10 View
2003-03-25 TRNA Transmittal of New Application 3 View
2003-03-25 SPEC Specification 7 View
2003-03-25 CLM Claims 1 View
2003-03-25 ABST Abstract 1 View
2003-03-25 DRW Drawings-only black and white line drawings 2 View
2003-03-25 OATH Oath or Declaration filed 3 View
2003-03-25 LET. Miscellaneous Incoming Letter 1 View
2003-03-25 WFEE Fee Worksheet (SB06) 1 View
2003-03-25 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/396,148
Filed
2003-03-25
Pub. No.
US20030183508A1
Art Unit
1753