Granted Patent
Utility
US 6,815,333
· Confirmation No. 9370
TRI-LAYER MASKING ARCHITECTURE FOR PATTERNING DUAL DAMASCENE INTERCONNECTS
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-10-01 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-07-22 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-07-22 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-07-22 | CLM |
Claims | 7 | View | |
| 2004-07-22 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-07-22 | FWCLM |
Index of Claims | 1 | View | |
| 2004-07-22 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-07-20 | SRNT |
Examiner's search strategy and results | 5 | View | |
| 2004-05-14 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-05-14 | CLM |
Claims | 14 | View | |
| 2004-05-14 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-05-14 | FWCLM |
Index of Claims | 1 | View | |
| 2004-05-07 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-05-07 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2004-02-20 | CTNF |
Non-Final Rejection | 13 | View | |
| 2004-02-20 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-02-20 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2004-02-20 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-02-20 | FWCLM |
Index of Claims | 1 | View | |
| 2004-02-18 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2004-02-17 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2004-01-02 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2003-12-16 | CTRS |
Requirement for Restriction/Election | 4 | View | |
| 2003-12-16 | FWCLM |
Index of Claims | 1 | View | |
| 2003-09-15 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-06-18 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2003-06-18 | FOR |
Foreign Reference | 35 | View | |
| 2003-06-18 | FOR |
Foreign Reference | 33 | View | |
| 2003-06-18 | FOR |
Foreign Reference | 34 | View | |
| 2003-06-18 | FOR |
Foreign Reference | 46 | View | |
| 2003-06-05 | OATH |
Oath or Declaration filed | 1 | View | |
| 2003-05-23 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2003-03-28 | TRNA |
Transmittal of New Application | 2 | View | |
| 2003-03-28 | SPEC |
Specification | 21 | View | |
| 2003-03-28 | ABST |
Abstract | 1 | View | |
| 2003-03-28 | DRW |
Drawings-only black and white line drawings | 11 | View | |
| 2003-03-28 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-03-28 | 136A |
Authorization for Extension of Time all replies | 1 | View |
Inventors
Paul H. Townsend III
Midland, MI
Lynne K. Mills
Midland, MI
Joost J. M. Waeterloos
Heverlee Vlaams Brabant, BELGIUM
Richard J. Strittmatter
Midland, MI
Attorneys & Agents of Record
Classification
USPC
438/623
H10W20/01
H10P14/665
H10P76/20
H10P76/2041
H10P76/405
H10P14/6922
H10P50/73
H10W20/085
H10W20/072
H10P14/662
H10W20/46
H10P14/6686
H10W20/088
H10D64/011
H10P14/683
H10P14/6506
H10W20/087
H10P14/40
H10P14/6342
H10P14/6508
H10W20/071
Prosecution
- Examiner
- LEE, HSIEN MING
- Art Unit
- 2823
- Customer No.
- 109
- Docket No.
- 62104B
- Confirmation No.
- 9370
Publication
- Pub. No.
- US20030219973A1
- Pub. Date
- 2003-11-27
Patent Term Adjustment
0days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-09-29
from
DOW BELGIUM B.V.B.A.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-09-29
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Quick Facts
- Patent No.
- US 6,815,333
- App. No.
- 10/402,073
- Filed
- 2003-03-28
- Granted
- 2004-11-09
- Pub. No.
- US20030219973A1
- Examiner
- LEE, HSIEN MING
- Art Unit
- 2823
- PTA
- 0 days
External Links