Plasma treatment apparatus
View Patent ↗There is provided a plasma treatment apparatus that carries out plasma treatment on an article, with which it is possible to make the plasma density uniform. A plasma treatment vessel houses a semiconductor wafer and a treatment gas is introduced into the plasma treatment vessel. A lower electrode is provided inside the plasma treatment vessel and the semiconductor wafer is placed onto the lower electrode. An upper electrode that has a plurality of holes formed therein and has a dome shape that is upwardly convex, is provided above the lower electrode in the plasma treatment vessel. A height of the upper electrode from the lower electrode becomes greater from an outside of the lower electrode to a center of the lower electrode.
1. A plasma treatment apparatus that carries out plasma treatment on an article, the plasma treatment apparatus comprising:
a vacuum vessel that houses the article and into which a treatment gas is introduced;
a lower electrode that is provided inside said vacuum vessel and onto which is placed the article;
an upper electrode that is provided above said lower electrode in said vacuum vessel; and
a high-frequency power source that supplies high-frequency electrical power;
wherein a return current flows back to said high-frequency power source;
wherein said high-frequency power source supplies the high-frequency electrical power to said lower electrode;
wherein said upper electrode has an inside electrode part that is provided in a central part of said upper electrode, an outside electrode part that is provided surrounding said inside electrode part, an insulating part that is interposed between said outside electrode part and said inside electrode part, and a variable impedance part that is electrically connected between said inside electrode part and said outside electrode part; and
wherein said variable impedance part changes inductance or capacitance thereof such that respective impedances in different frequency ranges are individually changed so as to change a value of return current in a high-frequency range among return currents corresponding to respective frequency ranges which flows back to said high-frequency power source via said inside electrode part without changing a value of return current in a low-frequency range.
2. A plasma treatment apparatus as claimed in claim 1 , wherein said variable impedance part is one selected from the group consisting of a variable inductor and a variable capacitor.
3. A plasma treatment apparatus as claimed in claim 1 , wherein said inside electrode part is grounded via said variable impedance part and said outside electrode part.
4. A plasma treatment apparatus as claimed in claim 1 , wherein said insulating part is made of Al 2 O 3 or SiO 2 .
5. A plasma treatment apparatus as claimed in claim 1 , wherein a frequency corresponding to the return current in the high-frequency range is 100 MHz.
6. A plasma treatment apparatus as claimed in claim 1 , wherein a frequency corresponding to the return current in the low-frequency range is 3.2 MHz.