IP Library › Granted Patent US 6,784,105
Granted Patent Utility
US 6,784,105 · Confirmation No. 7031

IN SITU METAL BARRIER DEPOSITION FOR SPUTTER ETCH ON AN INTERCONNECT STRUCTURE

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2004-07-20 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-05-03 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-03 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
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2004-05-03 FWCLM Index of Claims 1 View
2004-05-03 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-02-09 SPEC Specification 4 View
2004-02-09 CLM Claims 4 View
2004-02-09 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-11-05 CTNF Non-Final Rejection 7 View
2003-11-05 892 List of references cited by examiner 1 View
2003-04-09 TRNA Transmittal of New Application 2 View
2003-04-09 ADS Application Data Sheet 6 View
2003-04-09 SPEC Specification 11 View
2003-04-09 CLM Claims 3 View
2003-04-09 ABST Abstract 1 View
2003-04-09 DRW Drawings-only black and white line drawings 11 View
2003-04-09 OATH Oath or Declaration filed 4 View
2003-04-09 LET. Miscellaneous Incoming Letter 1 View
2003-04-09 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-04-09 SRFW Search information including classification, databases and other search related notes 1 View
2003-04-09 FWCLM Index of Claims 1 View
2003-04-09 TRNA Transmittal of New Application 2 View
2003-04-09 DRW Drawings-only black and white line drawings 11 View
2003-04-09 SPEC Specification 11 View
2003-04-09 CLM Claims 3 View
2003-04-09 ABST Abstract 1 View
2003-04-09 OATH Oath or Declaration filed 4 View
2003-04-09 WFEE Fee Worksheet (SB06) 1 View
2003-04-09 WFEE Fee Worksheet (SB06) 1 View
2003-04-09 ADS Application Data Sheet 6 View
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Quick Facts
Patent No.
US 6,784,105
App. No.
10/410,496
Filed
2003-04-09
Granted
2004-08-31
Art Unit
2813
PTA
-4 days