IP Library › Granted Patent US 6,804,288
Granted Patent Utility
US 6,804,288 · Confirmation No. 6933

ELECTRON BEAM EXPOSURE APPARATUS AND ELECTRON BEAM DEFLECTION APPARATUS

Inventor: Takeshi Haraguchi
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2004-08-30 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-04-23 TRNA Transmittal of New Application 2 View
2003-04-23 ADS Application Data Sheet 2 View
2003-04-23 SPEC Specification 22 View
2003-04-23 CLM Claims 5 View
2003-04-23 ABST Abstract 1 View
2003-04-23 DRW Drawings-only black and white line drawings 9 View
2003-04-23 OATH Oath or Declaration filed 3 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,804,288
App. No.
10/422,304
Filed
2003-04-23
Granted
2004-10-12
Pub. No.
US20030183778A1
Examiner
HOANG, TU BA
Art Unit
3742
PTA
0 days