Patent Application
Utility
App. No. 10/430,611
· Confirmation No. 3302
CHEMICAL MECHANICAL PLANARIZATION (CMP) SYSTEM AND METHOD FOR DETERMINING AN ENDPOINT IN A CMP OPERATION
Inventor:
Joseph P. Simon
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-05-03 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-05-05 | TRNA |
Transmittal of New Application | 2 | View | |
| 2003-05-05 | SPEC |
Specification | 16 | View | |
| 2003-05-05 | CLM |
Claims | 3 | View | |
| 2003-05-05 | ABST |
Abstract | 1 | View | |
| 2003-05-05 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2003-05-05 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Joseph P. Simon
Newark, CA
Attorneys & Agents of Record
Classification
USPC
451/60
B24B37/013
B24B49/12
Prosecution
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- Customer No.
- 25920
- Docket No.
- LAM2P333D
- Confirmation No.
- 3302
Publication
- Pub. No.
- US20030190869A1
- Pub. Date
- 2003-10-09
Patent Term Adjustment
-6days
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 10/430,611
- Filed
- 2003-05-05
- Granted
- 2004-06-15
- Pub. No.
- US20030190869A1
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- PTA
- -6 days
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