Patent Application
Utility
App. No. 10/109,902
· Confirmation No. 3392
CHEMICAL MECHANICAL PLANARIZATION (CMP) SYSTEM AND METHOD FOR DETERMINING AN ENDPOINT IN A CMP OPERATION
Inventor:
Joseph P. Simon
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-03-29 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-03-29 | SPEC |
Specification | 16 | View | |
| 2002-03-29 | CLM |
Claims | 5 | View | |
| 2002-03-29 | ABST |
Abstract | 1 | View | |
| 2002-03-29 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2002-03-29 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Joseph P. Simon
Newark, CA
Attorneys & Agents of Record
Classification
USPC
451/6
B24B37/013
B24B49/12
Prosecution
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- Customer No.
- 25920
- Docket No.
- LAM2P333
- Confirmation No.
- 3392
Patent Term Adjustment
-126days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2008-05-18
from
SIMON, JOSEPH P.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-03-29
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Quick Facts
- App. No.
- 10/109,902
- Filed
- 2002-03-29
- Granted
- 2003-08-26
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- PTA
- -126 days
External Links