IP Library Patent Application 10109902
Patent Application Utility
App. No. 10/109,902 · Confirmation No. 3392

CHEMICAL MECHANICAL PLANARIZATION (CMP) SYSTEM AND METHOD FOR DETERMINING AN ENDPOINT IN A CMP OPERATION

Inventor: Joseph P. Simon
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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Code Description Pages PDF
2002-03-29 TRNA Transmittal of New Application 3 View
2002-03-29 SPEC Specification 16 View
2002-03-29 CLM Claims 5 View
2002-03-29 ABST Abstract 1 View
2002-03-29 DRW Drawings-only black and white line drawings 5 View
2002-03-29 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/109,902
Filed
2002-03-29
Granted
2003-08-26
Art Unit
3723
PTA
-126 days