Radiation-emitting semiconductor component based on gallium nitride, and method for fabricating the semiconductor component
View Patent ↗A radiation-emitting semiconductor component has a high p-type conductivity. The semiconductor body of the component includes a substrate, preferably an SiC-based substrate, on which a plurality of GaN-based layers have been formed. The active region of these layers is arranged between at least one n-conducting layer and a p-conducting layer. The p-conducting layer is grown in tensile-stressed form. The p-doping that is used is preferably Mg.
1. A radiation-emitting semiconductor component, comprising:
a semiconductor body formed of a substrate and a plurality of GaN-based layers applied on said substrate;
said plurality of GaN-based layers including at least one active region arranged between at least one n-conducting layer containing AlGaN and at least one p-conducting layer, and said p-conducting layer being a layer grown on in tensile-stressed form such that tensile stresses of the p-conducting layer extend in a direction substantially parallel to a plane of the layer;
wherein said at least one n-conducting layer has an Al content lower than an Al content of said at least one p-conducting layer, and layers disposed between said at least one n-conducting layer and said at least one p-conducting layer are thinner than said at least one n-conducting layer so that a lattice constant thereof is defined by said at least one n-conducting layer; and
wherein the Al content within said at least one n-conducting layer increases in a direction toward said substrate.
2. The semiconductor component according to claim 1 , wherein said substrate is an SiC-based substrate.
3. The semiconductor component according to claim 1 , wherein said at least one p-conducting layer is doped with at least one dopant selected from the group consisting of Mg, Zn, and C.
4. The semiconductor component according to claim 1 , wherein said at least one p-conducting layer contains AlGaN.
5. The semiconductor component according to claim 1 , wherein said at least one p-conducting layer is grown on a layer having a lattice constant greater than a lattice constant of said at least one p-conducting layer.
6. The semiconductor component according to claim 1 , wherein said active region is formed as a quantum well structure.
7. The semiconductor component according to claim 1 , wherein said active region is formed as a single quantum well structure or as a multiple quantum well structure.
8. The semiconductor component according to claim 6 , wherein said quantum well structure is formed by a sequence of GaN and InGaN layers.
9. The semiconductor component according to claim 1 , wherein said active region is encased in a waveguide structure.
10. The semiconductor component according to claim 9 , wherein said waveguide structure consists of at least one GaN-based layer disposed between said active region and said at least one n-conducting layer and at least one-GaN based layer disposed between said active region and said at least one p-conducting layer.
11. The semiconductor component according to claim 1 , wherein said at least one n-conducting layer is formed between said substrate and said active region.