Wafer edge with light sensor
View Patent ↗An apparatus for detecting the presence of a substrate that is carried by an end effector of a substrate handling assembly positioned within a substrate processing system comprises a receiving member that is coupled to an end effector and a light sensor that is operatively coupled to the receiving member and is configured to detect an amount light transmitted by the receiving member. In a modified embodiment, the apparatus also includes a transmitting member that receives light from a light source and is also coupled to the end effector.
1. An apparatus for detecting the presence of a substrate that is carried by an end effector of a substrate handling assembly positioned within a substrate processing system, the apparatus comprising:
a first receiving member that is coupled to the end effector such that the first receiving member moves with the end effector;
a light sensor that is operatively coupled to the first receiving member and is configured to detect an amount of light received by the first receiving member; and
a control system operatively coupled to the light sensor and configured to indicate the presence of the substrate based upon the amount of light detected by the light sensor;
wherein a tip portion of the first receiving member is positioned such that, when the substrate is properly carried by the end effector in a first position, the substrate substantially blocks ambient light from being received by the tip portion of the first receiving member and wherein the apparatus does not include a transmitting member coupled to the end effector and configured to transmit light into the first receiving member.
2. The apparatus as in claim 1 , wherein the first receiving member comprises a quartz rod.
3. The apparatus as in claim 1 , comprising a flexible connector member that operatively couples the first receiving member to the light sensor.
4. The apparatus as in claim 3 , wherein the flexible connector member comprises a fiber optic cable.
5. The apparatus as in claim 1 , wherein the first receiving member comprises a polished face that is orientated approximately 45 degrees with respect to a longitudinal axis of the first receiving member.
6. A method for monitoring the position of a substrate within a substrate processing system, comprising:
providing an end effector that includes a first receiving member that is coupled to an end effector of the substrate processing system and does not include a transmitting member coupled to the end effector;
providing a light detection sensor, which is operatively coupled to the first receiving member;
detecting the presence of a substrate when the first receiving member receives a first amount of light from an ambient light source; and
detecting the absence of a substrate when the first receiving member receives a second amount of ambient light that is greater than the first amount of ambient light.
7. The method as in claim 6 , wherein, when the substrate is present and properly orientated, the substrate substantially blocks ambient light from entering the first receiving member.