Customizing traveling wave optical modulators
View Patent ↗In a method of fabricating a traveling wave optical modulator, an optical waveguide structure having an optical waveguide and a signal electrode path extending from a signal input to a termination output is formed. The signal electrode path is modified to include a customized signal electrode having a transmission line characteristic substantially matching a target transmission line parameter value. In another aspect, a traveling wave optical waveguide structure includes an optical waveguide and a signal electrode path. The signal electrode path extends from a signal input to a termination output and is defined by an electrode seed structure. The electrode seed structure is exposed for subsequent electrode formation and has a transmission line characteristic detrimental to proper propagation of an electrical modulation signal.
1. A method of fabricating a traveling wave optical modulator, comprising:
before a target transmission line parameter value for a customized signal electrode has been determined, forming an optical waveguide structure having an optical waveguide and a signal electrode path extending from a signal input to a termination output;
storing the formed optical waveguide structure;
while the optical waveguide structure is being stored, determining the target transmission line parameter value; and
after the target transmission line parameter value has been determined, modifying the signal electrode path to include the customized signal electrode having a transmission line characteristic substantially matching the target transmission line parameter value.
2. The method of claim 1 , wherein the target transmission line parameter value is determined from a customer order for the traveling wave optical modulator.
3. The method of claim 1 , wherein, before the signal electrode path is modified, the signal electrode path is defined by an electrode seed structure exposed for subsequent electrode formation.
4. The method of claim 3 , wherein the electrode seed structure comprises a metal film.
5. The method of claim 4 , wherein the metal film has a thickness less than 0.5 μm.
6. The method of claim 3 , wherein the signal electrode path is modified by forming a signal electrode on the electrode seed structure.
7. The method of claim 6 , wherein the signal electrode is formed by electroplating a metal film on the electrode seed structure.
8. The method of claim 6 , wherein the signal electrode is formed by depositing a metal film on the electrode seed structure.
9. The method of claim 1 , wherein, before the signal electrode path is modified, the signal electrode path is defined by an uncustomized signal electrode structure.
10. A method of fabricating a traveling wave optical modulator, comprising:
forming an optical waveguide structure having an optical waveguide and a signal electrode structure extending from a signal input to a termination output in a plane and having a first thickness normal to the plane; and
thinning the signal electrode structure to a second thickness that is normal to the plane and is smaller than the first thickness, wherein the thinned signal electrode structure has a transmission line characteristic substantially matching a target transmission line parameter value.
11. The method of claim 10 , wherein the signal electrode structure is thinned by etching.
12. The method of claim 1 , wherein modifying the signal electrode path comprises substantially matching the transmission line characteristic of the customized signal electrode to a target characteristic impedance value.
13. The method of claim 12 , wherein the transmission line characteristic of the customized signal electrode is substantially matched to an impedance value between approximately 20 ohms and approximately 50 ohms.
14. The method of claim 1 , wherein the optical waveguide structure is an electro-absorption-type optical waveguide structure.
15. The method of claim 1 , wherein the optical waveguide structure is an electro-optic-type optical waveguide structure.
16. The method of claim 3 , wherein the electrode seed structure has a transmission line characteristic detrimental to proper propagation of an electrical modulation signal.
17. The method of claim 3 , wherein the electrode seed structure is characterized by an attenuation factor a, the electrode seed structure has a characteristic length L, and α≧1/L.
18. The method of claim 3 , wherein the electrode seed structure is characterized by a characteristic impedance greater than 50 ohms.
19. The method of claim 3 , wherein the electrode seed structure is characterized by an electrical propagation parameter N E , the optical waveguide is characterized by an optical propagation parameter N 0 , and N E /N O <0.5.
20. The method of claim 3 , wherein the electrode seed structure is characterized by an electrical propagation parameter N E , the optical waveguide is characterized by an optical propagation parameter N 0 , and N E/N O <2.0.