Micro-electromechanical actuator and methods of use and fabrication
View Patent ↗A micro-electromechanical actuator and related methods of use that use a pair of electrodes separated by a linkage. The linkage is biased to a neutral position wherein the electrodes are spaced apart from each other, but also allows at least one electrode to move toward the other electrode when an appropriate force, such as voltage from the power source, is applied to the electrodes. The linkage is sized and shaped to allow the electrodes to move together when a defined threshold voltage is applied by the power source, thereby allowing the micro-elecromechanical actuator to function as a manufacturing quality testing device or a micromechanical actuator in other applications. The actuator may be fabricated simultaneously with other micromechanical and micro-electromechanical components on the same substrate using conventional semi-conductor and micro-machining manufacturing equipment.
1. A method for fabricating a micro-electromechanical actuator containing a conductive linkage into a substrate, said method including:
providing a substantially planar substrate;
operably securing the substrate to a handle wafer with a conductive bonding layer such that at least one opening between the substrate and handle wafer is provided at a defined location;
micro-machining the actuator into the substrate such that the linkage is positioned adjacent to the at least one opening between the handle wafer and substrate, and micro-machining a first electrode into the linkage and a second electrode into the substrate such that when a defined voltage is applied to the first and second electrodes, the linkage moves the first electrode toward the second.
2. The method for fabricating a micro-electromechanical actuator containing a linkage into a substrate of claim 1 , wherein said operably securing the substrate to a handle wafer step includes bonding the substrate to the handle wafer with a bonding layer.
3. The method for fabricating a micro-electromechanical actuator containing a linkage into a substrate of claim 2 , wherein said bonding the substrate to the handle wafer with a bonding layer includes applying a first bonding agent to a surface on the substrate and applying a second bonding agent to a surface on the handle wafer and joining the first and second bonding agents together to form a bond.
4. The method for fabricating a micro-electromechanical actuator containing a linkage into a substrate of claim 3 , further including the step of heating the first and second bonding agents to form the bond.