IP Library › Patent Application 10489460
Patent Application Utility PCT National Stage
App. No. 10/489,460 · Confirmation No. 9126

Method and apparatus for sputter deposition of epilayers with high deposition rate

Inventor: Roman Chistyakov
Abandoned -- Incomplete Application (Pre-examination)
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Quick Facts
App. No.
10/489,460
Effective Filing
2004-03-11
Art Unit
1753