Patent Application
Provisional
App. No. 60/325,331
· Confirmation No. 2223
Apparatus and method for epitaxial sputter deposition of epilayers with high deposition rate
Inventor:
Roman Chistyakov
Provisional Application Expired
Inventors
Roman Chistyakov
Andover, MA
Attorneys & Agents of Record
Prosecution
- Docket No.
- 6427
- Confirmation No.
- 2223
from
TELEPHOTONICS, INC
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-11-05
BESSEMER VENTURE PARTNERS V, L.P.,
BESSEC VENTURES V L.P.,
BLUE CHIP CAPITAL FUND III LIMITED PARTNERSHIP,
ATLAS VENTURE FUND V, L.P.,
ATLAS VENTURE PARALLEL FUND V-A, C.V.,
ATLAS VENTURE PARALLEL FUND V-B, C.V.,
ATLAS VENTURE ENTREPRENEURS' FUND V L.P.,
GATX VENTURES INC.,
THIRD COAST CAPITAL
from
TELEPHOTONICS, INC.
SECURITY INTEREST
Recorded 2002-07-01
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Quick Facts
- App. No.
- 60/325,331
- Filed
- 2001-09-27
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