Material for electronic device and process for producing the same
An electronic device material comprising at least an electronic device substrate and a silicon oxynitride film disposed on the substrate is provided. The silicon oxynitride film is characterized by containing nitrogen atoms in a large amount in the vicinity of the oxynitride film surface when the nitrogen content distribution in the thickness direction of the silicon oxynitride film is examined by SIMS (secondary ion mass spectrometry) analysis. By virtue of this constitution, an electronic device material comprising an oxynitride film having an excellent effect of preventing penetration of boron and having excellent gate leak properties can be obtained.
1. A process for treating a substrate by plasma nitridation, comprising:
providing the substrate having an oxide film thereon; and
irradiating plasma having an electron temperature of 0.5 to 2.0 eV on the oxide film using a mixed gas comprising argon gas and nitrogen gas to form an oxynitride film, wherein
the plasma is irradiated on the oxide film at a temperature of 250 to 500° C. and under a pressure of 7 to 260 Pa,
a nitrogen atom content in the oxynitride film has a distribution such that the maximum value Ns of the nitrogen atom content in the oxynitride film at a surface of the oxynitride film opposite a surface facing the substrate is 10 to 40 atomic percent, and the maximum value Nb of the nitrogen atom content in the oxynitride film at the surface facing the substrate side is 0 to 10 atomic percent,
the ratio Ns/Nb is 2 or more, and
the oxynitride film has an electrical film thickness from 1.0 to 2.5 nm.
2. A process according to claim 1 , wherein the plasma is generated using microwave irradiation by using a plane antenna member having a plurality of slots.
3. A process according to claim 1 , wherein the oxide film is formed by plasma processing or thermal oxidation.
4. A process for treating a substrate by plasma nitridation, comprising:
forming an oxide film on the substrate; and
irradiating plasma on the oxide film using a mixed gas comprising argon gas and nitrogen gas to form an oxynitride film, wherein
the plasma is irradiated on the oxide film at a temperature of 250 to 500° C. and under a pressure of 7 to 260 Pa,
a nitrogen atom content in the oxynitride film has a distribution such that the maximum value Ns of the nitrogen atom content in the oxynitride film at a surface of the oxynitride film opposite a surface facing the substrate is 10 to 40 atomic percent, and the maximum value Nb of the nitrogen atom content in the oxynitride film at the surface facing the substrate side is 0 to 10 atomic percent,
the ratio Ns/Nb is 2 or more, and
the oxynitride film has an electrical film thickness from 1.0 to 2.5 nm.
5. A process according to claim 4 , wherein the plasma is generated using microwave irradiation by using a plane antenna member having a plurality of slots.
6. A process according to claim 4 , wherein the ratio Ns/Nb is 4 or more.
7. A process for forming a gate oxynitride film, comprising:
providing a substrate having an oxide film thereon; and
irradiating plasma having density of 1×10 10 to 5×10 12 /cm 3 and an electron temperature of 0.5 to 2.0 eV on the oxide film using a mixed gas comprising argon gas and nitrogen gas to form the oxynitride film, wherein
the plasma is irradiated on the oxide film at a temperature of 250 to 500° C. and under a pressure of 7 to 260 Pa,
a nitrogen atom content in the oxynitride film has a distribution such that the maximum value Ns of the nitrogen atom content in the oxynitride film at a surface of the oxynitride film opposite a surface facing the substrate is 10 to 40 atomic percent, and the maximum value Nb of the nitrogen atom content in the oxynitride film at the surface facing the substrate side is 0 to 10 atomic percent,
the ratio Ns/Nb is 2 or more, and
the oxynitride film has an electrical film thickness from 1.0 to 2.5 nm.
8. A process according to claim 7 , wherein the plasma is generated using microwave irradiation by using a plane antenna member having a plurality of slots.