Composition for antireflection coating and method for forming pattern
View Patent ↗An anti-reflective coating film is formed by applying on a chemically amplified photoresist film an anti-reflective coating composition comprising an alkali-soluble fluorine-containing polymer, an acid, an amine and a solvent capable of dissolving these components and having a pH of 7 or less. The formed anti-reflective coating film can serve to prevent multiple reflections within the photoresist film, increase the amount of reduction in thickness of the photoresist film upon development with a developer after exposure, and form a pattern having a rectangular cross-sectional pattern and not having T-top or round top.
1. An anti-reflective coating composition which comprises a fluorine-containing polymer, an acid, an amine and an aqueous solvent capable of dissolving these components, further where the coating composition has a pH ranging from about 1.0 to about 6.0, and further where the fluorine-containing polymer is a polymer comprising a polymer unit represented by the following general formula (I),
—[CF 2 CF(OR f COOH)]— (I)
wherein R f represents a straight or branched perfluoroalkyl group which may contain an etheric oxygen atom, further wherein the acid is at least one member selected from the group consisting of sulfuric acid, hydrochloric acid, nitric acid, phosphoric acid, hydrofluoric acid, hydrobromic acid, alkylsulfonic acid, alkylbenzenesulfonic acid, alkylcarboxylic acid, alkylbenzenecarboxylic acid, and those obtained by replacing all or part of the hydrogen atoms of the aforesaid alkyl group by fluorine atoms, and further where alkyl of the acid is 1 to 20 carbon atoms and the acid is in the amount of 0.1% by total weight to 2.0% by total weight.
2. The anti-reflective coating composition as described in claim 1 , wherein the fluorine-containing polymer further comprises a unit represented by the following general formula (II):
—[CF 2 CFX]— (II)
wherein X represents a fluorine atom or a chlorine atom.
3. The anti-reflective coating composition as described in claim 1 , wherein the amine is at least one member selected from the group consisting of NH 3 , N(CH 3 ) 4 OH, alkanolamine, alkylamine and aromatic amine.
4. The anti-reflective coating composition as described in claim 1 , wherein the aqueous solvent is water.
5. A pattern-forming method which includes a step of applying the anti-reflective coating composition of claim 1 on a photoresist film and, if necessary, a heating step.
6. The anti-reflective coating composition as described in claim 1 , where the coating composition has a pH ranging from about 1.0 to about 4.0.
7. The anti-reflective coating composition as described in claim 1 , where the coating composition has a pH ranging from about 1.6 to about 2.6.
8. The anti-reflective coating composition as described in claim 2 , where the coating composition has a pH ranging from about 1.0 to about 6.0.
9. The anti-reflective coating composition as described in claim 2 , where the coating composition has a pH ranging from about 1.0 to about 4.0.
10. The anti-reflective coating composition as described in claim 2 , where the coating composition has a pH ranging from about 1.6 to about 2.6.
11. The anti-reflective coating composition according to claim 1 , wherein the acid is dodecylbenzenesulfonic acid.