Fiber array for optical communication and method of manufacturing the fiber array
There is provided a multi-cored fiber array for optical communication which has high dimensional accuracy, can easily be prepared by machining, and is low in cost. There is also provided a fiber array for optical communication which can reduce the necessary amount of an adhesive used for fixing optical fibers to a substrate. The fiber array for optical communication comprises: a substrate for inserting optical fibers therein; and a press plate for pressing and fixing the inserted optical fibers. The substrate has a plurality of grooves into which the optical fibers are to be inserted. The accuracy of the center-to-center dimension between the grooves adjacent to each other is within ±0.5 μm, and the degree of parallelization in the groove length direction between the grooves adjacent to each other is within ±0.1 degree.
1. A method for manufacturing a fiber array for optical communication, the fiber array comprising: a substrate for inserting optical fibers therein; and a press plate for pressing and fixing the inserted optical fibers, said substrate having a plurality of grooves into which said optical fibers are to be inserted, the accuracy of the center-to-center dimension between said grooves adjacent to each other being within ±0.5 μm, the degree of parallelization in the groove length direction between said grooves adjacent to each other being within ±0.1 degree, said method comprising the steps of:
forming grooves into which said optical fibers are inserted in said substrate by pulsed laser beam machining;
etching the inner wall of said formed grooves after said laser beam machining;
inserting optical fibers into the formed grooves; and
joining and fixing said inserted optical fibers to said substrate and said press plate.
2. The method according to claim 1 , wherein said pulsed laser beam is a femtosecond laser beam.
3. The method according to claim 1 , wherein said etching is carried out with at least one inorganic acid selected from the group consisting of hydrofluoric acid, hydrochloric acid, nitric acid, and sulfuric acid.