Producing method of electrostatic sucking type liquid jetting head, producing method of nozzle plate, driving method of electrostatic sucking type liquid jetting head, electrostatic sucking type liquid jetting apparatus and liquid jetting apparatus
First, through a coating step, a photolithography step and an etching step, a plurality of electrodes 142, 142 , . . . are formed on a base plate 141 . Next, a resist layer 143 b is formed on the base plate 141 so as to cover all of the electrodes 142, 142 , . . . , and by exposing and developing the resist layer 143 b , a nozzle 103 having a super minute diameter is formed to stand with respect to the base plate 141 so as to make the resist layer 143 b correspond to each electrode 142 , and an in-nozzle passage is formed in each nozzle 103.
1. A producing method of an electrostatic sucking type liquid jetting head having a plurality of nozzles for jetting liquid solution as a droplet from a nozzle edge, comprising:
forming a plurality of jetting electrodes on a base plate for applying a jetting voltage;
forming a photosensitive resin layer on the base plate so as to cover all of the plurality of jetting electrodes;
making the photosensitive resin layer stand with respect to the base plate so as to correspond to each jetting electrode and so as to form the photosensitive resin layer in a nozzle shape having a nozzle diameter of more than 0.2 μm and of not more than 4 μm, by exposing and developing the photosensitive resin layer;
forming an in-nozzle passage so as to establish a communication from an edge portion of the nozzle to the jetting electrode in the nozzle; and
connecting the in-nozzle passage to a liquid solution supplying channel corresponding to the plurality of nozzles.
2. The producing method of the electrostatic sucking type liquid jetting head of claim 1 , further comprising:
making at least an inside surface of each liquid solution supplying channel insulating; and
providing a control electrode for controlling a meniscus position of the liquid solution at the edge portion of the nozzle, in the liquid solution supplying channel.
3. The producing method of the electrostatic sucking type liquid jetting head of claim 2 , wherein the liquid solution supplying channel is formed from a piezoelectric material.
4. The producing method of the electrostatic sucking type liquid jetting head of claim 1 , wherein the photosensitive resin layer is a fluorine-containing resin.
5. A producing method for producing a nozzle plate having a plurality of nozzles for jetting liquid solution as a droplet from a nozzle edge, comprising:
forming a plurality of jetting electrodes on a base plate for applying a jetting voltage;
forming a photosensitive resin layer on the base plate so as to cover all of the plurality of jetting electrodes;
making the photosensitive resin layer stand with respect to the base plate so as to correspond to each jetting electrode and so as to form the photosensitive resin layer in a nozzle shape having a nozzle diameter of more than 0.2 μm and of not more than 4 μm, by exposing and developing the photosensitive resin layer; and
forming an in-nozzle passage so as to establish a communication from an edge portion of the nozzle to the jetting electrode in the nozzle.
6. The producing method of the nozzle plate of claim 5 , wherein the photosensitive resin layer is a fluorine-containing resin.