Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith
View Patent ↗The invention relates to a method of manufacturing a micro-electromechanical device ( 10 ), in which are consecutively deposited on a substrate ( 1 ) a first electroconductive layer ( 2 ) in which an electrode ( 2 A) is formed, a first electroinsulating layer ( 3 ) of a first material, a second electroinsulating layer ( 4 ) of a second material different from the first material, and a second electroconductive layer ( 5 ) in which a second electrode ( 5 A) lying opposite the first electrode is formed which together with the first electrode ( 2 A) and the first insulating layer ( 3 ) forms the device ( 10 ), in which after the second conductive layer ( 5 ) deposited, the second insulating layer ( 4 ) is removed by means of an etching agent which is selective with respect to the material of the second conductive layer ( 5 ). According to the invention for the first material and the second material materials are selected which are only limitedly selectively etchable with respect to each other and before depositing the second insulating layer ( 4 ) a further layer ( 6 ) is provided on top of the first insulating layer ( 3 ) of a further material that is selectively etchable with respect to the first material. In this way a silicon oxide and a silicon nitride may be applied for the insulating layers ( 3, 4 ) and thus the method according to the invention is very compatible with current IC processes. The second insulating layer ( 4 ) is preferably removed locally by etching, then the further layer ( 6 ) is completely removed by etching and, finally, the second insulating layer ( 4 ) is completely removed by etching.
1. A method for manufacturing a micro-electromechanical device ( 10 ), in which are consecutively deposited on a substrate ( 1 ) a first electroconductive layer ( 2 ) in which a first electrode ( 2 A) is formed, a first electroinsulating layer ( 3 ) of a first material, a second electroinsulating layer ( 4 ) of a second material, different from the first material, and a second electroconductive layer ( 5 ) in which a second electrode ( 5 A) lying opposite the first electrode is formed which together with the first electrode ( 2 A) and the first insulating layer ( 3 ) forms the device ( 10 ), in which after the second conductive layer ( 5 ) has been deposited, the second insulating layer ( 4 ) is removed by means of an etching agent that is selective with respect to the material of the second conductive layer ( 5 ), characterized in that for the first material and the second material are selected materials that can be etched only limitedly selectively with respect to each other and for depositing the second insulating layer ( 4 ) on top of the first insulating layer ( 3 ) a further layer ( 6 ) is deposited on top and in direct contact with the first electroinsulating layer of a further material that can be etched selectively with respect to the first material.
2. A method as claimed in claim 1 , wherein the material of the further layer ( 6 ) is selected such that the second insulating layer ( 4 ) can be removed selectively with respect to the further layer ( 6 ).
3. A method as claimed in claim 1 , wherein the second insulating layer ( 4 ) is first removed locally and preferably selectively with respect to the further layer ( 6 ) up to the further layer ( 6 ), then the further layer ( 6 ) is removed selectively with respect to the first insulating layer ( 3 ) after which the second insulating layer ( 4 ) is removed in its entirety.
4. A method as claimed in claim 3 , wherein for the further material of the further layer ( 6 ) and for the material of the conducting layers ( 2 , 5 ) the same material is chosen and for removing the further layer ( 6 ) the second electroconductive layer ( 5 ) is covered with a masking layer ( 7 ) for the etching agent of the further layer ( 6 ).
5. A method as claimed in claim 1 , wherein silicon nitride is chosen for the first material and silicon oxide for the second material.
6. A method as claimed in claim 5 , wherein an aqueous solution of ammonium fluoride (NH 4 F) and nitrogen fluoride (HF) is chosen as an etching agent fur removing the second insulating layer ( 4 ).
7. A method as claimed in claim 1 , wherein the electroconductive layers ( 2 , 5 ) and the further layer ( 6 ) are made of aluminum.
8. A method as in claim 7 , wherein a mixture of phosphoric acid, acetic acid and sulphuric acid is chosen as an etching agent for the further layer ( 6 ).
9. A method as claimed in claim 1 , wherein both the first conductive layer ( 2 ) and the second conductive layer ( 5 ) are formed as two interrupted parts (( 2 A, 2 B), ( 5 A, 5 B)), the interrupted parts ( 5 A, 5 B) of the second conductive layer ( 5 ) being formed on top of the interrupted parts ( 2 B, 2 A) of the first conductive layer ( 2 ).
10. A method as claimed in claim 1 , wherein all layers ( 2 , 3 , 4 , 5 , 6 , 11 ) are deposited by means of CVD or sputtering.
11. A micro-electromechanical device ( 10 ) obtained from implementing a method as claimed in claim 1 .
12. A micro-electromechanical device ( 10 ) as claimed in claim 11 and comprising a tunable capacitor.