Poly-silicon stringer fuse
View Patent ↗A polysilicon silicide stringer fuse is constructed having a narrow width by using an overlay tolerance of the photo stepper tool instead of the minimum critical dimension tolerance of the stepper tool. In an example embodiment, a fuse ( 200 ) for integration within a semiconductor comprises depositing an insulating layer ( 205 ) adjacent to the semiconductor substrate ( 203 ). A silicon layer ( 201 ) is formed with a first silicon material having a first resistance deposited adjacent the insulating layer ( 205 ). The silicon layer has a first width. A metal silicide stringer ( 202 ), having a second resistance different from the first resistance is deposited over a portion of the first silicon material ( 201 ) and having a second width that is less than the first width within at least a portion thereof. The metal silicide conducts current therethrough with approximately the second resistance and agglomerates in response to a programming current other than the conduct current therethrough with a same second resistance.
1. A fuse for integration within a semiconductor circuit comprising: an insulating layer deposited adjacent the semiconductor substrate; a silicon layer formed a first silicon material having a first resistance deposited adjacent the insulating layer, the silicon layer having a first width; and, a metal silicide stringer having a second resistance different from the first resistance deposited over a portion of the first silicon material and having a second width that is less than the first width within at least a portion thereof, the metal silicide for conducting current therethrough with approximately the second resistance and for agglomerating in response to a programming current to other than conduct current therethrough with a same second resistance.
2. The fuse as recited in claim 1 wherein the silicon layer is a poly-silicon layer.
3. The fuse as recited in claim 1 wherein the silicide layer is a tungsten silicide layer.
4. The fuse as recited in claim 1 wherein the silicide layer is a platinum silicide layer.
5. The fuse as recited in claim 1 wherein the first resistance is higher than the second resistance.
6. The resistor fuse as recited in claim 1 wherein the resistor fuse forms a portion of a non-volatile multi-state memory cell.
7. The resistor fuse as recited in claim 6 wherein the memory cell is one-time programmable.
8. The resistor fuse as recited in claim 1 wherein the insulating layer comprises an oxide layer.
9. A method of manufacturing a silicided polysilicon fuse comprising the steps of: depositing an insulating layer on a semiconductor substrate; depositing polysilicon adjacent the insulating layer; forming a silicide protection layer adjacent the polysilicon; removing a portion of the silicide protection layer to reveal polysilicon therebelow; providing a mask for masking other than the revealed polysilicon; aligning the mask with the semiconductor substrate; and, forming a metal silicide layer adjacent the revealed polysilicon, the metal silicide layer for forming a conductive path along a length thereof.
10. A method according to claim 9 comprising the step of providing electrical contacts on opposite sides of the length of the metal silicide layer.
11. A method according to claim 9 wherein the insulating layer comprises an oxide layer.
12. A method according to claim 9 wherein the polysilicon layer is patterned.
13. A method according to claim 9 wherein the step of forming a silicide protection layer is performed by depositing a silicide protection layer on the polysilicon.
14. A method according to claim 9 wherein the step of forming a silicide protection layer is performed by reacting at least a chemical with the polysilicon.
15. A method according to claim 9 wherein the step of removing a portion of the silicide protection layer comprises a step of etching a portion of the silicide protection layer.
16. A method according to claim 9 forming a metal silicide layer comprises a step of: depositing a metal silicide adjacent the revealed polysilicon.
17. A method according to claim 9 forming a metal silicide layer comprises a step of: reacting at least a chemical including a metal with the revealed polysilicon.