Method for fabricating GaN-based nitride layer
View Patent ↗The present invention relates to a method for fabricating a gallium nitride(GaN) based nitride layer including a step of forming a silicon carbide buffer layer on a substrate, a step of forming a wetting layer having a composition of In(x1)Ga(y1)N (0<x1≦1, 0≦y1<1, x1+y1=1) on the silicon carbide buffer layer, and a step of forming a nitride layer containing gallium and nitrogen on the wetting layer, thereby can implement an opto-electronic device of high efficiency and high reliability.
1. A method for fabricating a GaN-based nitride layer including:
a first step of forming a non-single crystalline silicon carbide buffer layer having a thickness of 5 Å to 200 Å on a sapphire substrate;
a second step of forming a wetting layer having a composition of In(x1)Ga(y1)N (0≦x1≦1, 0≦y1<1, x1+y1=1) on the silicon carbide buffer layer; and
a third step of forming a nitride layer comprising gallium and nitrogen on the wetting layer.
2. The method for fabricating a GaN-based nitride layer of claim 1 , wherein in the first step, at least one of CBr 4 or C x H y (where x are y are integers) is used as a carbon precursor.
3. The method for fabricating a GaN-based nitride layer of claim 1 , wherein the growth temperature (T) of the silicon carbide buffer layer is within a range of 600° C.≦T<990° C.
4. The method for fabricating a GaN-based nitride layer of claim 1 , wherein the wetting layer is formed in a single layer.
5. The method for fabricating a GaN-based nitride layer of claim 1 , wherein the wetting layer is formed in a combination of two or more layers.
6. The method for fabricating a GaN-based nitride layer of claim 1 , wherein the growth temperature of the wetting layer is within a range of 400° C. to 900° C.
7. The method for fabricating a GaN-based nitride layer of claim 1 , wherein the wetting layer has a thickness of 100 Å to 500 Å.
8. The method for fabricating a GaN-based nitride layer of claim 1 , wherein in the second step, the V/III ratio has a value and the value is within a range of 1 to 5000 and is lower than a V/III ratio causing hillocks to occur in the nitride layer.
9. The method for fabricating a GaN-based nitride layer of claim 1 , wherein the nitride layer is made of a combination of two or more layers.
10. The method for fabricating a GaN-based nitride layer of claim 1 , wherein the growth temperature of the nitride layer is within a range of 800° C. to 1200° C.
11. The method for fabricating a GaN-based nitride layer of claim 1 , wherein in the third step, the V/III ratio has a value of 500 to 20000.
12. A method for fabricating a GaN-based nitride layer above a substrate, the method comprising:
a step of forming a non-single crystalline silicon carbide buffer layer on the substrate prior to growing the GaN-based nitride layer; and
a step of forming a wetting layer having a composition of In(x1)Ga(y1)N (0≦x1≦1, 0≦y1<1, x1+y1=1) on the silicon carbide buffer layer prior to growing the GaN-based nitride layer.
13. A method for fabricating a GaN-based nitride layer including:
a first step of forming a silicon carbide buffer layer on a substrate;
a second step of forming a wetting layer having a composition of In(x1)Ga(y1)N (0<x1≦1, 0≦y1<1, x1+y1=1) on the silicon carbide buffer layer at a first temperature; and
a third step of forming a nitride layer containing gallium and nitrogen on the wetting layer at a temperature higher than the first temperature.
14. method for fabricating a GaN-based nitride layer above a substrate, the method comprising:
a step of forming a silicon carbide buffer layer on the substrate at a temperature of 600° C. to 990° C. prior to growing the GaN-based nitride layer; and
a step of forming a wetting layer having a composition of In(x1)Ga(y1)N (0≦x1≦1, 0≦y1<1, x1+y1=1) on the silicon carbide buffer layer prior to growing the GaN-based nitride layer.
15. A method for fabricating a GaN-based nitride layer above a substrate, the method comprising:
a step of forming a silicon carbide buffer layer of 5 Å to 200 Å in thickness on the substrate prior to growing the GaN-based nitride layer; and
a step of forming a wetting layer having a composition of In(x1)Ga(y1)N (0≦x1≦1, 0≦y1<1, x1+y1=1) on the silicon carbide buffer layer prior to growing the GaN-based nitride layer.