Coating composition and low dielectric siliceous material produced by using same
View Patent ↗The present invention provides a coating composition, which can simply produce a porous siliceous film having excellent mechanical strength and, at the same time, possessing a stable very low level of dielectric and good chemical resistance to various chemicals, and to provide a process for producing a siliceous material using the same. The coating composition according to the present invention comprises a polyalkylsilazane compound, an acetoxysilane compound, an organic solvent, and, if necessary, a pore forming material. The present invention also provides a siliceous material produced by firing the coating composition and a process for producing the same.
1. A coating composition comprising: a polyalkylsilazane compound; an acetoxysilane compound; and an organic solvent; where said polyalkylsilazane compound contains one or both groups represented by formulae (2) and (3)
wherein R 5 to R 11 each independently represent a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, provided that both R 5 and R 6 do not simultaneously represent hydrogen and all of R 9 to R 11 do not simultaneously represent hydrogen, and further where the acetoxysilane compound is selected from tetraacetoxysilane, methyltriacetoxysilane, ethyltriacetoxysilane, ethoxytriacetoxysilane, isopropoxytriacetoxysilane, n-butoxytriacetoxysilane, dimethyldiacetoxysilane, diethyldiacetoxysilane, diisopropyldiacetoxysilane, di-n-butyldiacetoxysilane, dimethoxydiacetoxysilane, diethoxyacetoxysilane, diisopropoxydiacetoxysilane, and di-n-butoxydiacetoxysilane, and further where the composition comprises a pore forming agent, and where the pore agent is a siloxy-containing polyethylene oxide compound.
2. A siliceous material produced by coating a coating composition according to claim 1 onto a substrate or by filling a coating composition according to claim 1 into a frame or a groove, and firing the coating composition.
3. A semiconductor device comprising a siliceous material according to claim 2 as an intermetal dielectric.
4. A process for producing a siliceous material, comprising heating a coating composition according to claim 1 at a temperature of 350° C. or below for 1 to 60 min.
5. A coating composition comprising: a polyalkylsilazane compound; an acetoxysilane compound; and an organic solvent; where said polyalkylsilazane compound contains one or both groups represented by formulae (2) and (3)
wherein R 5 to R 11 each independently represent a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, provided that both R 5 and R 6 do not simultaneous represent hydrogen and all of R 9 to R 11 do not simultaneous represent hydrogen, and further where the acetoxysilane compound is selected from tetraacetoxysilane, methyltriacetoxysilane, ethyltriacetoxysilane, ethoxytriacetoxysilane, isopropotriacetoxysilane, n-butoxytriacetoxysilane, dimethyldiacetoxysilane, diethyldiacetoxysilane, diisopropyldiacetoxysilane, di-n-butyldiacetoxysilane, dimethoxydiacetoxysilane, diethoxyacetoxysilane, diisopropoxydiacetoxysilane, and di-n-butoxydiacetoxysilane, and further where the acetoxysilane compound is in the range 5% to 40% by weight based on the weight of the polyalkylsilazane compound.