Method for manufacturing p-type group III nitride semiconductor, and group III nitride semiconductor light-emitting device
An object of the present invention is to provide an efficient method for manufacturing a p-type group III nitride semiconductor that has adequate carrier concentration and a surface with a low occurrence of crystal damage. The inventive method for manufacturing a p-type group III nitride semiconductor comprises: (a) growing a group III nitride semiconductor containing a p-type dopant at 1000° C. or higher in an atmosphere containing H 2 gas and/or NH 3 gas; and (b) after the growth of the group III nitride semiconductor, substituting the H 2 gas and NH 3 gas with an inert gas at a temperature higher than 800° C. while reducing the temperature.
1. A method for manufacturing a p-type group III nitride semiconductor comprising:
(a) growing a group III nitride semiconductor containing a p-type dopant at a temperature of 1000° C. or higher in an atmosphere containing H 2 gas and/or NH 3 gas; and
(b) after the growth of the group III nitride semiconductor, substituting the H 2 gas and NH 3 gas with an inert gas at the temperature of 900° C. or more while reducing the temperature at 0.5° C./second or faster without maintaining a constant temperature during reducing the temperature and after the temperature is reduced 50° C. or more from the temperature maintained during the growth of the group III nitride semiconductor.
2. The method for manufacturing a p-type group III nitride semiconductor according to claim 1 , wherein the temperature during growth of the group III nitride semiconductor is 1050° C. or more, and the substitution with the inert gas is carried out at 1000° C. or more.
3. The method for manufacturing a p-type group III nitride semiconductor according to claim 1 , wherein the group III nitride is represented by the formula Al x In y Ga 1-x-y (wherein x=0 to 0.5 and y=0 to 0.1).
4. The method for manufacturing a p-type group III nitride semiconductor according to claim 1 , wherein the p-type group III nitride semiconductor contains magnesium as the p-type dopant.